AS

0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Step Motor Controller

Output the step data no. 15 ms or more 15 ms or more Input Input DRIVE DRIVE ON OFF ON OFF OUT OUT BUSY BUSY Output Output INP INP Speed Positioning operation 0 mm/s Speed Pushing operation 0 mm/s If the current pushing force exceeds the trigger LV value of the step data, the INP signal will be turned ON.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.

HRX-OM-R005

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060

Rotary Gripper Series MRHQ

0 t MHZ MHF MHL MHR MHK Description Material Note Component Parts !8 !9 @2 @0 @1 No.

I

Frequency 4Hz Pressure Unit kPa psi MPa kgf/cm2 bar Preset Pressure Range 0~975 0~142 0~0.98 0~9.9 0~9.8 CIRCUIT AND E L E C T R I C A L CONNECTION S E T T I N G INSTRUCTIONS H O W T O P R E S E T P R E S S U R E S W I T C H: K e e p p re s s i n g t h e p u s h b u t t o n ( 1 ) S E T a n d tur n the pressure set trimmer (3) P.SET and f i g u r e s a r e s h o w n o n t h e p r e s s u

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

S R S J I H Stroke ZPR20F10-0-A14 20 3 +10 0 ZPR25F10-0-A14 30 +7 12.8 24.3 15.2 26.2 +20 ZPR32F10-0-A14 50 +25 +52 +40 13-11-115 20 Series ZPR 40 50 J K ZPR F 0-0-A14 (With buffer) S S M14 x 1 Hexagon width across flats 19 M14 x 1 Hexagon width across flats 19 I 5 5 I 5 5 J J Hexagon width across flats 12 Hexagon width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R

10

Piston rod Thread dimensions (mm) M6 x 0.75 M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 5.3 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 7.1 9.1 12.7 18.7 25.7 Thread prepared hole dia. (mm) Nut tightening torque (Nm) 0.85 1.67 3.14 10.8 23.5 62.8 Do not damage. 2.

C85

42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

CG5-S

R V Integral clevis type (E)/CG5ENS ZZ + Stroke CD hole H10 Shaft d9 L M GA GB RR U CX LL 2P H1 Width across flats B1 LY CI D I MM AL A K LH LE KA 4-J LT C 0.1 NA LF LP LG S + Stroke Z + Stroke LZ + Stroke LV LX H 4-LD (mm) Stroke range A Bore size (mm) AL B1 C CD (hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U +0.058 0 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.3 0 0.3 20 8 16 to 200

AHC System Series MA

x 3.4 depth 12.5 Magnet for tool stand sensor Air pressure port 6 x M3 x 0.5 Applicable shaft diameter d D Mass (g) Model Air pressure port 6 x M5 x 0.8 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 0-YNM5 MA3 0-YNM5-R1 MA3 0-YNM5-R2 MA3 0-YNM5-R3 MA3 0-YNM5-R4 MA3 0-YNM5-R5 MA3 0-YNM5-S6 MA3 0-YNM5-R6 MA3 0-AM3 MA3 0-AM5 440 Electrical contact points: 12 10 11 35 14 AHC unit 15 520 20 24

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

.0 100 0 105 100 100 105 105 Functions Sub screen setting function The display of the sub screen can be selected.

Vacuum Unit

0 20 40 60 80 60 60 Suction flow [L/min (ANR)] 50 50 Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Flow Rate Characteristics 40 40 100 Air consumption Vacuum pressure [kPa] 30 30 80 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 20 40 60 80 Supply pressure [MPa] Suction flow [L/min (ANR)] ZK215

C85

42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

SI unit for DeviceNet ®

Instance attribute ID Access rule Description Value 1 Get/Set 1 MAC ID 0-63 2 Get/Set 1 Baud Rate 0-2 3 Get/Set BOI 0-1 4 Get/Set Bus-off Counter 0-255 5 Get Allocation Information 6 Get MAC ID Switch Changed 0-1 7 Get Baud Rate Switch Changed 0-1 8 Get MAC ID Switch Value 0-63 9 Get Baud Rate Switch Value 0-2 10 Set Quick Connect 0-1 1: "Set is available in SW mode. 3-4.

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Process Pump

0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate

10

145 (1.0) 0.52 1.90 490 0 to 116 (0 to 0.8) 2 VX254 1/4, 3/8 7 1.08 0.44 3.99 490 0 to 22 (0 to 0.15) 5 0.75 0.55 1.96 620 0 to 116 (0 to 0.8) 3 VX264 1/4, 3/8 8 1.58 0.33 5.67 620 0 to 44 (0 to 0.3) Note) Weight of grommet type.

LVQ

0 1 2 N.C.