VDW

Please consult with SMC regarding other voltages. 30 Manifold Options Blanking plate assembly P Series 10, 20 VVCW20 3A P Series 30 VVDW 0 3A 2 Series Material 1 2 Material 10 20 Plate material Seal material NBR FKM EPDM Symbol G H J Plate material Seal material NBR FKM EPDM Symbol G H J Stainless steel Stainless steel Plate material is stainless steel only. 248 Series VDW10/20/30 Compact

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

RSH/RS1H

G5-S 20 is socket set screw CV MVGQ CC 20, 32 only RB J Replacement Parts: Shock Absorber Replacement Parts: Seal Kit DKit no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J Ideal for separating and feeding individual parts from vibratory feeders, magazines, and hoppers.

Free Mount Cylinder

Series CU comparison Allowable kinetic energy (J) : with air cushion Noise reduction of more than 11dB is possible (compared to Series CU20 with rubber bumper). : with rubber bumper 3 Interchangeable mounting Mounting dimensions (J, K, R, and E) are the same as the rubber bumper type Series CU. 2 1 0.70 0.44 0.11 0.28 0.29 0. 18 R 20 25 32 E Bore size (mm) Improved repeatability K J When

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com WA Z Bottom view Section XX Z WA L 4-MM depth ML Section XX HA: T-slot for hexagon bolt 4-NN through 4-OA through 4-OB counterbore depth OL X 0.02 X 0.02 DA VB VA R U T X H PW DB XA depth 6 H7 XA depth 6 H7 2-P (Rc, NPT, G) GA 2-P PB (Rc, NPT, G) J K

10

J Nylon tarpaulin 70C K Heat resistant tarpaulin 110C* * Max. ambient temperature for rod boot itself. Water Resistant Air Cylinder Mounting Brackets/Part No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (Single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (Single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

LVQ

Stainless steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

Stopper Cylinder

Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K A

7.5

X, PE port F: D-sub connector (25 pins) P: Flat ribbon cable (26 pins) PG: Flat ribbon cable (20 pins) PH: Flat ribbon cable (10 pins) J: PC wiring (20 pins) Elbow fitting (Downward) B With external pilot spec. X, PE port PCW type There is no need to enter anything when the SUP/EXH block mounting position M is selected. Pilot spec.

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN Q B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (

HRX-OM-T002

HRS090 Series 6.1Option M [DI water (Pure water) piping] 6-1 HRX-OMT002 Chapter 6 Option 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling. Refer 3.6 Option J Piping ofAutomatic fluid filling for the installation of the automatic fluid filling.

53

Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

IDG

.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 IDG10/10H IDG20/20H Values inside [ ] are for NPT threads. 83 187 53 165 62 113 212 54 190 82 1/4, 3/8 14-19-30 27 Series IDG Membrane Air Dryer Single Unit Type IDG30/50

CM2

0.4 J 0.65 J 1.2 J JIS Symbol Double acting, Single rod CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Standard Stroke Maximum stroke (mm) Standard stroke (mm) Note) Bore size (mm) MB1 20 1000 CA2 25 1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 CS1 2000

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Symbol Material -XC14 Change of trunnion bracket mounting position J 70C Nylon tarpaulin -XC15 Change of tie-rod length Bore size (mm) Cylinder stroke (mm) 110C K Heat resistant tarpaulin -XC18 NPT finish piping port 180 1,569 Maximum ambient temperature for the rod boot itself.

CNG

Refer to page 13 regarding the trunnion bracket. 11 Cylinder with Lock Double Acting: Single Rod Series CNG Clevis type (D): With rubber bumper/CNGDN Rc(PT) BP unlocking port Unlocks when pressurized Rc(PT) P Rear cylinder port RR L S + Stroke H GB A F K GA BN GC AL 8-J CZ TT H1 Rc(PT) P CD H10 (hole dia.) MM Front cylinder port d9 (shaft dia.)