VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Electric Slide Table/Compact Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LES8, 16, 25 Series LES RoHS How to Order S 1 1 R J 6N LES 8 30 q w e r t y u i o !0 !1 !2 !

2-Color Display Digital Flow Switch Series PFM

If a bend (R) is used, limit it to R3 or less. Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system.

Series VS

R(EXH) port piping: Take care that exhaust air is not throttled. (Otherwise, delay in response or cylinder malfunction may result.) Solenoid Precautions Operation Conditions 1. Ensure that voltage leakage across the coil is as follows. DC coil: No more than 3% of the rated voltage AC coil: No more than 20% of the rated voltage 2.

Air Slide Table Series MXS

2) Option R is not available with the MXS6 series.

IDX-OM-W089

IDFA6E-20 12 2 12-3 Installation of heavy duty auto drain IDX-OM-W089 Air Dryer 13 Specification for Option R 13 Specification for Option R Option R installs a Ground Fault Circuit Interrupter (GFCI), it will shut off the power supply in case the product should have over current or current leakage.

ITV-E

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

Profi-E

M ai nt enance and i nspect i on Turn of f t he pow er suppl y, st op t he suppl i ed ai r, exhaust t he resi dual com pressed ai r and veri f y t he rel ease of ai r bef ore perf orm i ng m ai nt enance. Forei gn m at t er caught i n t he i nl et of pi pi ng or exhaust m ay i nt erf ere w i t h norm al operat i on. Peri odi c cl eani ng i s necessary.

Miniature Regulator Series ARJ210

4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette Aluminum alloy Brass Brass POM Brass Brass Brass Brass Steel wire Stainless steel Steel band NBR NBR SS Steel band POM, Stainless steel !

I

How To Order Manifold Base NvvsFs<2o-H6S(T;-oo. . i r -007 serias vFsooo Manifoldl ;rY't5"r,on" Itanilold spsciticaliols+ : 1010 siations Appllcable itodel:NW5F5-2O R ' Series NVFSOO Construction,/Parts List Sngle Solenoid Symbol 3 Posiiion Cloced Center Main Parts No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

JIS B2401-1A-P85 NBR I.D. 84.6 x 5.7 O-ring r JIS B2401-4D-P85 FPM JIS B2401-1A-P11 NBR u !

Series M Miniature Fittings M3, R(PT) 1/8, M5

32 to 140F (5 to 60C) Ambient and fluid temperature Accepts Many Types of Plastic Tubing 1 8 M3, M5, R(PT) Port size JIS B 0209 Class 2 (Metric coarse thread), JIS B 0203 (Taper pipe thread) Thread Hose nipple and hose elbow accepts nylon, soft nylon, and polyurethane tubing.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

O

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

O

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

KT10

P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.