Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Manifold Specifications

In the case of base mounting, 2(A) port of 3 port valve should be 2(B) port of manifold base.

Sine Cylinder Series REC

BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Sine Cylinder Series REC

BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Sine Cylinder Series REC

BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 2) Do not use in a line where a pressurized condition is maintained since the body may be damaged. Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Max. 1 2 Min.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

PSxx-OMT0005CN

02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V 1 k N.C.

VFRA3000

B: 34.2 (1.9) A, BEA, EB: 45 (2.5) [A, BEA, EB: 27 (1.5)] VFRA3311-03 1 4 VFRA3411-02 3 position exhaust center 0.72 1 8 PA, B: 36 (2.0) A, BEA, EB: 50.4 (2.8) [A, BEA, EB: 28.8 (1.6)] 3 8 VFRA3411-03 1 4 39.6 (2.2) [PA, B: 16.2 (0.9)] VFRA3511-02 3 position pressure center 0.72 1 8 VFRA3511-03 3 8 41.4 (2.3) [PA, B: 16.2 (0.9)] JIS symbol 2 position single 3 position closed center ( ):

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Oil Filter FH150 Series

(kg) Model FH150-02 FH150-03 FH150-04 1/4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

Pressure Relief 3 Port Valve with Locking Holes

VHS40-06-D 3/4 1/2 34.0 0.22 7.6 16.1 0.41 4.4 VHS50-D 3/4 1/2 45.0 0.26 10.6 23.0 0.49 6.4 1 53.3 0.36 13.5 22.8 0.49 6.3 -7- 4How to Order VHS D 30 03 Symbol Description Body size 20 30 40 50 Handle operation Nil Single action W Double action Thread type Nil Rc *2) N NPT F G 01 1/8 02 1/4 03 3/8 Port size 04 1/2 06 3/4 10 1 a Mounting Nil Without mounting option B With bracket Option

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16