lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

HEC-OM-S019

T With stand for vertical installation 8 1 15 9 D-sub 15 pin (Socket type) Fixed screw: M2.6 Description No.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

EX600-WEN_WSV.eng

(M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. M12 4-pin Socket, D-code 4 Configuration Pin No. Signal name The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

EXxx-OMV0028.eng

(M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. M12 4-pin Socket, D-code 4 Configuration Pin No. Signal name The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

Precision Regulator

Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8. Dimensions 13 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ZPT

06 6 08 8 10 10 13 13 16 16 20 20 1 8 NPT N01 1 8 NPTF T01 1 8 25 25 32 32 40 40 50 50 Material Pad type (Refer to Table (1) for applications.)

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

{8) o.2a 17l o.47 (12) o32 (8) o.12 (3) Miuimebas in Peenthe66s

SI unit for EtherNet/IP TM

Fieldbus interface connector layout BUS OUT: M12 4-pin socket, D-coded (SPEEDCON) No. Designation Description 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data BUS IN: M12 4-pin socket, D-coded (SPEEDCON) No.

Compact manifold regulator ARM5 Series

5/16 8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

E-MY2_E_D

B C E 8 3 4 6 Switch No.

VND

1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D

Multi-channel Digital Sensor Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) Check if there is a noise source nearby. System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%.

ZP

lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B Model d H B C NTJ-015A 9.2 8 4 M8 x 1 M6 x 1 M5 x 0.8 SNJ-006A 9.2 8 3 SNJ-010A 3 12 13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E G 3.3 H 9.1 Y 4 F 13 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10

Dedicated Controller

Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

VY511, VYU5

Controller (VYU5-D) External appearance of exclusive controller RUN1 STOP START SEL. SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

TM

(mm) Mounting screw L2 H2 D W1 H1 P L1 W2 W3 Model (Nominal x Length) 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 6 4 2.2 2.8 2.8 3.2 3.2 2 x 6 2.6 x 8 2.6 x 8 3 x 8 3 x 8 TM-04 TM-06 TM-08 TM-10 TM-12 7.5 9.5 91.5 5.5 77.5 6 7.5 77.5 6 15 9 93 12.5 6.5 4.5 16.3 8.8 14.3 7.5 12 12 10 8 9.8 How to Use 2.

DOC1023894

50 or more 12 168 or more 132 or more 88 or more 60 or more 8 - 2.