Compact Vacuum Unit Ejector/ Vacuum Pump System

Mount the filter case securely, otherwise the V port may come off or be damaged. Filter case (2) The V port assembly and removal may not be easy if the product is mounted on the floor. If it is forcibly mounted or removed, the V port assembly may be damaged and/or it may cause vacuum leakage.

LEF-OM006xx

LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 (W) 30 36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 63 102 (W) 5) 4 /9 4 /9 (W) 6) 70 113 7) (N) 20 39 78 157 (W) 8) 3.6 5 (V) DC2410% LEFS16A LEFS25A (mm) 100 200 300 (400) 100 200

CRJ

Leakage current from switch is 1mA. 8 Solid State Auto Switches/Direct Mount Type D-F8N, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8 (with indicator light) D-F8B Perpendicular D-F8N Perpendicular D-F8P Perpendicular Auto switch part no.

AR20-B to AR60-B

Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

Water-cooledThermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub 9 (Male receptacle) P2: Serial RS-485 D-sub 9 (Female receptacle) P1: Contact input/output D-sub 25 (Female receptacle) Power cable entry Rear side 116 Common Specifications Series HRW Operation Display Panel q Description No.

CEx-OMP0016

Without Guide Operating Conditions Model : ML2B32 Load : 15N Speed , Va : 0.25m/s Pressure : 0.5MPa L1 : 0.05m L2 : 0.05m W W L1 L1 Loading Static Load Dynamic Load Side load due to W W3 Moment due to W M2 Moment due to we when stopping M3 V M1 V Static Load W3max=60Nm (Checked from graph with Va) W3 15 Load factor a1= = =0.25 W3max 60 M2max=2Nm (Checked from graph

OML0002-C

Always use a UL listed/recognized power supply that is a class-2 power supply with DC 24 V and under 2.1 A. 3. To keep specified performance of the product, provide class D grounding to the metal (shaded) part around the external face of the product.

RSQ

RB 5 V, 12 V IC circuit 3-wire (PNP) Grommet 2-wire 12 V J Connector 3-wire (NPN) Relay, PLC 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) D3-wire (PNP) Grommet 12 V Water resistant (2-color indication) 2-wire -X With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit 20Lead wire length symbols: 0.5 mNil (Example) A73C 3 m L (Example) A73CZ

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

M9NAV1 5 V, 12 V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC Yes 24 V Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V IC circuit A93 A90 100 V 100 V or less Relay, PLC 2-wire 12 V

Pin Cylinder: Double Acting, Single Rod Series CJP2 ø4, ø6, ø10, ø16

Yes A93 A93V 100 V 12 V Grommet Relay, PLC 24 V 2-wire A90 A90V No 5 V, 12 V IC circuit 100 V or less The D-A9(V) switch is not attachable to 4. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M M9NWM 3 m L M9NWL 5 m Z M9NWZ Auto switches marked with are made to order specification. For details about auto switches with pre-wired connector, refer to pages 1328 to 1329.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

G D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped connector SL-J1A Main transmission line Transmission line 24V 0V Power supply{ 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ Special

Cylinder with Lock Double Acting, Single Rod Series CNS ø125, ø140, ø160 How to Order CNS L 100 125 D 100 M9BW D L 125 CDNS With auto switch With auto switch Number of auto switches (Built-in magnet) Nil 2 pcs. Mounting style S 1 pc. Basic style B Tubin

) IC circuit A96 5 V Yes A33 A34 A44 A93 A90 A54 A59W 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

CJP

Load voltage Lead wire length (m) Indicator light Auto switch model Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line 97 Relay, PLC Reed switch Grommet 12 V 24 V 2-wire Yes 93A 100 V Auto switch cannot be mounted on the clevis style or trunnion style.

CJP

Load voltage Lead wire length (m) Indicator light Auto switch model Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line 97 Relay, PLC Reed switch Grommet 12 V 24 V 2-wire Yes 93A 100 V Auto switch cannot be mounted on the clevis style or trunnion style.

ISO Standard Hydraulic Cylinder ø 40, ø 50, ø 63, ø 80, ø 100 CHSD Series

Table 1 Manufacturability Check List by Mounting Type and Port Position Yes 100 V No Yes No Yes 100 V or less IC circuit Mounting bracket B LA CB TA FY FZ 12 V Grommet Relay PLC 2-wire Port position 24 V 100 V, 200 V A64 200 V or less Nil A B C D E A59W Diagnostic output (2-color indicator) Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 Safety Standard ISO13849-1 Certified * Refer to page 2 for compliant products. *

Thread Rc G NPT Nil None V V V A Yes 6 V B 1/4* V Z With light/surge voltage suppressor Port size Port size VP500 VP700 03 3/8" V 04 1/2" V * For internal pilot, the symbol is nil. * Refer to Piping for External Pilot Type on page 4 for selection of the check valve.