High Purity Chemical Valve

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" LQ2 integral fitting 12 1/2" 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.

Prevents Micro-Bubbles

4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5 5 19, 3/4" 19, 3/4" TI/ TIL How to Order Valve PA LVC 2 0 S07 A PAX Option PB Body class Nil 1 4 None With flow rate adjustment

JXCx-OMT0062

. 32 (3) Example circuit 3 Motor power shutdown . 33 7.

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Modular/F.R.L. Units Series AC

m 3 m 3 m 3 m Option 500 Note) This product is for overseas use only according to the new Measurement Law.

JXCx-OMT0002

Setting Data Entry . 48 9.1 Profile parameter . 48 9.2 Basic parameter . 49 9.3 Return to origin parameter . 51 9.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 10.

Dual Speed Controller with One-touch Fitting Series ASD

Note 3) 3/16" and 3/8 are made of POM, stainless steel, and brass (electroless nickel plated). Note 4) 3/16" and 3/8 are are made of brass (electroless nickel plated).

JXCx-OMY0004

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 1 1.5m Green 3 COM-A/COM B-3 3 3m Blue 4 COM-B/ A-3 (3) 5 5m Shield Cable color Terminal No. Vcc B-4 Brown 12 Black 13 GND A-4 A B-5 Red 7 Actuator cable type Black 6 A A-5 B B-6 Orange 9 Nil Robotic type cable Black 8 B A-6 3 S Standard cable (4) Signal name Terminal No.

Valve Single Unit

/pressure center JIS Symbol 3 position closed center 3 position exhaust center 3 position pressure center (This figure shows a closed center type.)

Shock Absorbers and Rate Controls

19.0/ -3' 3t.zo.3' 38.0 t6.o'3' 73 38 38 35 26 N/A 23.0 2 1tl PfN2 | 00cxt(sl 408 r9.04'19.o7fr 3t.lo i., 38.0 r6.0'fi 73 38 38 35 26 N/A 23.0 P 2l50(flt(S) 537 r 9.07-3 ' r9.07'3' 3r.zo 3',38.0 t6.l)f 5 7 1 38 38 35 I O r,l/A 23.0 5.08 PRO| |o(n(Sl 2l I 5.oo tl 5.00 -3' 8.00 i, o.oo j., fi/A 28 N/A 22 l l l 3 5.0 t.0 0.54 PR0r 25(lt(sl 180 6.38 -35 6.38 -3' 12.70 il I?.

HEC_W-E

FIG. 2-1 THE POSITION OF ATTACHING WARNING LABEL AND CAUTION LABEL -2-3 FIG. 2-2 DETAIL OF WARNING LABEL AND CAUTION LABEL -2-3 FIG. 3-1 INSTALLATION ENVIRONMENT -3-2 FIG. 3-2 FOOT MOUNTING SCREWS -3-3 FIG. 3-3 MOUNTING -3-3 FIG. 4-1 POSITION OF MODEL NO. LABEL -4-2 FIG. 4-2 LEGEND OF MODEL NO.

JXCx-OMT0001CN

1. 2. 3. 4

S Couplers Series KK/KKH/KK13

8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 1 1 Without check valve 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orenge 6 B B-2 Yellow 5 B A-2 1 1.5m Green 3 COM-A / COM B-3 Blue 4 3 3m COM-B / A-3 Shield 5 5m Cable color T erminal no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

A_HEC-OM-K001

. 3-2 3.2.3 Learning control function . 3-2 3.2.4 External sensor control function . 3-3 3.2.5 Temperature sensor fine control function . 3-3 3.2.6 Memorization of Set values function (Function that backs up with EEPROM) . 3-3 3.2.7 Temperature Upper / Lower Limit Alarm Function . 3-4 3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function

125

Aluminum alloy 1728 3 Port 3 Position Valve VEX3 Series Working Principle Fig. (1) A R Fig. (2) Closed center Fig. (3) P A 3(R) 3(R) 3(R) 2(A) 2(A) 2(A) 1(P) 1(P) 1(P) This is a 3-port switch valve in which the shaft 7 extending from the driving piston 3 opens/closes a pair of poppet valves 6.

HEC_001W-E

LABEL -3-2 3.4 APPEARANCE -3-3 3.5 OPERATING PRINCIPLES -3-4 3.5.1 CONSTRUCTION AND PRINCIPLE OF THERMOELECTRIC MODULE -3-4 3.5.2 CONSTRUCTION OF TEMPERATURE CONTROLLING DEVICE -3-5 3.5.3 ELECTRICAL DIAGRAM -3-6 3.6 FUNCTIONS-3-7 3.6.1 AUTO TUNING -3-7 3.6.2 OFFSET FUNCTION -3-7 ii Number of pages 3.6.3 LEARNING CONTROL FUNCTION-3-7 3.6.4 EXTERNAL TUNE CONTROL FUNCTION -3-7 3.6.5 TEMPERATURE

A_HEC-OM-I009

of Danger, Warning, Caution and Note -2-1 2.2 Warning label and Caution label -2-3 2.2.1 The position of attached Warning label and Caution label -2-3 2.3 Precautions for running(safety interlock) -2-4 2.3.1 Interlock list -2-5 2.4 Disposing of product -2-6 3 Caution on Installation -3-1 3.1 Environment -3-1 3.2 Installation -3-2 3.3 Mounting -3-2 3.4 Piping -3-3 3.5 Handling -3-3 4 Unit

Compact Manifold Regulator

PVQ VY1 VBA VBAT 3. Semi-standard 4.