CG1

20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 With rod boot ZZ Bore (mm) Applicable pin part no.

AC Servo Motor Driver (Network card type ）

Setting range: 1 to 16777215 1 5 22 5.

Compact 5-Port Solenoid Valve

solenoids available) Lead wire length (L1/L2/L3) 24 24 stations 22 22 stations Symbol Type 1 0.6 m 2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

Tie-rod Type Hydraulic Cylinder

18 25 14 17.5 9.5 M8 x 1.25 18 32 20 M14 x 1.5 30 22 1/4 37 15 106 50 19 50 25 9 73 53 14H9 24 20 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 21 55 28 8 80 60 16H9 28 22.4 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 26 65 M12 x 1.75 32 8 100 75 18H9 32 28 32 22 20 15 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10

Free Mount Cylinder Series CU

20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30 11-/22-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 11-/22-CDU25 25 Suction flow rate of vacuum suction type (Reference values) Specifications Size Suction flow rate l/min (ANR) 6 10 16/20/25 Bore size (mm) Item 6 10/16 20/25 6 10 12 1.05MPa 0.7MPa 0.12MPa

Free Mount Cylinder

If rotational torque are applied unavoidably, refer to page 22.

AC Servo Motor Driver

Symbol Name and function Initial value Unit Setting range Position Speed Torque PD13 *DO1 Output signal device selection 1 (CN1-22) Any output signal can be assigned to the CN1-22 pin. In the initial setting, INP is assigned in the position control mode, and SA is assigned in the speed control mode.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18 7 14 66 220

SMC Pneumatic Clean Series

25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150

1

CA2 B port Without auto switch With auto switch Bore size (mm) ZZ S ZZ S CS1 Stroke A Stroke B 125 334 197 334 197 140 Series CQS 334 197 334 197 C76 Bore size (mm) Stroke Both of S1, S2 160 363.5 213 363.5 213 B1 A B2 L 180 401 231 393 223 C85 12 42.5 22 (52.5) 3.5 17 (27) (22) 200 411 241 393 223 5 to 30 16 42.5 22 (52.5) 3.5 17 (27) (22) 250 484.5 283 C95 S + Stroke (A + B) 20 50 26

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Electric Actuator

Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.

LVQ

For high temperature 4 8 10 16 22 Note) Options (2) cannot be combined with each other. Buffer material FFKM Pilot port thread type For ammonium hydroxide High flow spec.

LEC-OM071xx

For details, refer to 8.25.2 Positioning Command. 20 21 ACCR MONITOR1 TLIM (torque limit): 22 Set the torque limit with an unsigned value.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

24 29 21 25 22 MS 24 22 95.5 91 24 21 32 24 29 25 37 29 19 26.5 24 32 37 30 22.5 19.5 91 85.5 M LQ 26.5 24 112.5 105.5 H 25 30 26 41 49 36 24 22 106.5 100 MQR Inch Size T B side A side Class 7 E1 E2 E2 L L E1 H1 M1 H2 M2 W Model Applicable tubing O.D.

Rotary Actuator/Vane Type

12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 38 4 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 52 8 41 4 54 90.5 21 80 14 24 22 100.5 16 40