Table of Contents - Tubing

TUB-21 Related Equipment .

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Applicable bore size (mm) SNJ-016SUS d A1 L L1 NDd9 MM B C H B C d H 0.030 0.060 0.030 0.060 10 10 10 14 7 3.3 8 16.2 4 8.1 3.2 15.2 21 M10 x 1.0 M4 x 0.7 M4 x 0.7 16 16 16 Y-J016SUS 17 8 NTJ-015SUS 5 11 19.6 4 9.2 4 SNKJ-016SUS 16.6 21 M12 x 1.0 M5 x 0.8 M5 x 0.8 NX R1 NDH10 U1 Part no. + 0.048 0 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 Y-J016SUS 5 6.5 12 10 Rod End Cap CJ5 CG5 T-bracket Flat type

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Booster Regulator/Air Tank

OUT port size 3/4 1/2 1/2 3/8 Ambient and fluid temperature (C) 0 to 75 Weight (kg) 21 14 10 6.6 Carbon steel (SS400) Material Outside: Silver paint, Inside: Rustproof paint Paint Mounting Note) The accessories and options are included in the same container. Caution 1.

VS7-6

VS7-8-FG-S AXT510-12 AXT510-21 AXT510-13 AXT510-13 AXT510-13 AXT510-14-2 AXT510-14-2 AXT510-14-2 AXT510-14-1 AXT510-14-1 AXT510-14-1 MY-16N MY-16N MY-14N Description No.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

DC () Blue Mass (g) D-F5P D-F59 D-F5P D-J59 D-J51 Auto switch model DC (+) Brown 23 23 21 21 0.5 Lead wire length (m) 81 81 71 71 3 127 127 111 111 5 OUT Black Dimensions (mm) D-F59/D-F5P/D-J59 DC () Blue Mounting hole D-J59 Indicator light OUT (+) Brown Main circuit of switch OUT () Blue Most sensitive position D-J51 D-J51 14 6 Main circuit of switch 6 4.5 OUT (~) Brown OUT (~) Blue 4 12

Air Slide Table/Long Stroke Type Series MXY

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

-/22-: Lithium soap based grease Grease 12-: Class 4, 21-: Class 5 Cleanliness class (ISO class) 11-/22-: Class 3 The maximum piston speed shown in the table above applies to the extension side.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 8 18 41 55.4 23.8 31.6 56.9 24.3

High Vacuum Slit Valve

When the shaft moves up and down, axial seal between a body 21 and outside is realized by O-rings and and a bellows .

VQ7-6/7-8

B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B L1 L2 L2 L1 B A PA A B B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

AC Servo Motor Driver (SSCNET Type)

Initial Test Drive .14 6.2.1 Start up the Setup software (MR Configurator2TM) . 15 6.2.2 System Settings . 16 6.2.3 Model Selection . 16 6.2.4 Driver ON LINE Check . 17 6.2.5 Help Function . 17 6.3 Parameter setting (Driver side) .18 6.3.1 Change of parameter block . 19 6.3.2 Reading parameters . 20 6.3.3 Parameter setting method . 20 6.3.4 The recommended parameters for each actuator . 21

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

AC Servo Motor Driver (MECHATROLINK-III type)

No.1 No.2 No.3 Setting the Station Address Station Address S1 S2 No.1 03H 0 3 04H 0 4 No. 2 05H 0 5 No. 3 21 - 4. Parameter setting (Driver side) The setting is a necessary parameter. Please optionally set it. Please refer to "LECYU manual" for a detailed parameter.

OMS0020

Position 1 AREA B Position 2 21 (2) Step Data Save Command "EU" Details Use after executing Step Data setting comand "EE".

OMR0031

External Connections . 20 4.1 CN1: Power supply connector . 20 4.2 CN2: Motor connector . 20 4.3 CN3: Serial I/O connector . 20 4.4 CN4: Counter connector (option) . 21 4.5 CN5: Parallel I/O connector . 21 5. CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6.

OMR0032

External Connections . 20 4.1 CN1: Power supply connector . 20 4.2 CN2: Motor connector . 20 4.3 CN3: Serial I/O connector . 20 4.4 CN4: Counter connector (option) . 21 4.5 CN5: Parallel I/O connector . 21 5. CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6.

Digital pressure switch for energy-saving control ejector

ZQ-OM01501 Contents Safety Instructions 2 How to order 9 Summary of Product parts 10 Definition and terminology 11 Electrical Connection 14 Wiring 14 Internal circuit and wiring example 15 Easy Setting 16 Measurement mode 16 Function Setting 19 Function selection mode 19 Default setting 19 F0 Unit selection function 21 F1 OUT1 22 F2 OUT2 24 F3 Response time 26 F4 Auto-preset 27 F6 Fine adjustment

ZQ-OM01601

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.