Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

9$ 9$ >5$ >5$ 9$ >5$ 9$ " ' $ $ '&$$ " ' $ $5$ '&$$ " ' $ $5$ '&$$ " ' $ $ '&$$ Rod extended when energized Rod retracted when energized Rod retracted when energized Rod extended when energized " ' $ $ '&$$ " ' $ $5$ '&$$ " ' $ $5$ '&$$ " ' $ $ '&$$ >5$ 9$ 9$ >5$ 9$ >5$ >5$ 9$ Valve Mounted Guide Cylinder Series MVGQ MVGQM, MVGQL 12, 16, 20 W ' ()" Z X YY *" YL Bottom

Fieldbus system PROFINET compatible SI Unit

Valve 14, 15 diagnostics 0: No error, 1: Short circuit Valve diagnostics 2 Table. 5-5 Valve diagnostics 2 Bit Description Explanation 0 Valve 16, 17 diagnostics 0: No error, 1: Short circuit 1 Valve 18, 19 diagnostics 0: No error, 1: Short circuit 2 Valve 20, 21 diagnostics 0: No error, 1: Short circuit 3 Valve 22, 23 diagnostics 0: No error, 1: Short circuit 4 Valve 24, 25 diagnostics

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

e-Rodless Actuator

Applicable auto switches/For detailed auto switch specifications, refer to page 17 through 21. Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Auto switch part no.

LEH_C

.00mm Force 40% 60 5 SET SET P.2735 5.3 10 - (5) 2.

E-MY2B_E_A

CONTENTS SAFETY 2 General General 3 positions 5 positions Model Indication Method 5 Names and Functions of Individual Parts 6 Installation 9 3 positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 5 positions Names and Functions of Controller 23 Example of Internal Circuit and Wiring 24 Setting 27

E-MY2_E_D

CONTENTS SAFETY 2 General General 3 positions 5 positions Model Indication Method 5 Names and Functions of Individual Parts 6 Installation 9 3 positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 5 positions Names and Functions of Controller 23 Example of Internal Circuit and Wiring 24 Setting 27

Fieldbus system EtherNet/IP TM compatible SI unit

Enable Generates an error. 1 -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. 2 Analogue input range (Range) Selects the analogue input range. -10..10 V 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit. 2s complement 2s complement.

Stroke Reading Cylinder and Counter

9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

CXS

10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

CXS

10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

CE

5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

EXxx-OMU0020CN

Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01() 1 Valve 18, 19 diagnostics 01() 2 Valve 20, 21 diagnostics 01() 3 Valve 22, 23 diagnostics 01() 4 Valve 24, 25 diagnostics 01() 5 Valve 26, 27 diagnostics 01() 6 Valve 28, 29 diagnostics 01() 7 Valve 30, 31 diagnostics 01() 36 No.EX-OMU0020CN 5.1.2.

VDW

21 27 27 Rectifier element AC type Rectifier element AC type 20 2 x 3.5 14 2 x 3.2 27 20 20.5 17 56 48 5 11 1 1 6 8 5 M5 1 (IN) port 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 M5 2 (OUT) port 15 2 x M3 x 5 2 x M2.5 x 3.5 VDW31-l G W 36 (27.6) Lead wire l Approx. 300 30 40 SMC SMC 1 1 Rectifier element AC type 4 x 5 25 34 28 Bracket assembly part no.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

ZR

Without lead wire (housing and 3 sockets) ZS-10-A With lead wire ZS-10-5ALead wire length Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc.

HRX-OM-W069

. 807Eh 2 3 Perform (6) for 2nd value (0006h) and then, perform (5). 2280h 4 Perform (6) for 3rd. value (0h) and then, perform (5).

EX500

, socket) 21.2 21.2 59.8 59.8 Power supply input connector (M12, 5 pins, plug, reverse keyway) 43.2 43.2 22.2 21 21 26.7 26.7 We sell this product individually.