A-HEC-OM-J004

If installed improperly, the product might leak water or topple, resulting in injury. 4.4 Installation 4-11 A_HEC-OM-J004-4 Chapter 5 Operation Chapter 5 Operation 5.1 Start of Operation 1. Confirm that the recirculating fluid has reached the LOW level of the tank and supply cooling water to the Liquid Tank. 2.

High Vacuum L Type Valve

55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

Electric Actuator / Low profile slider type

/See 2.1 Specifications on page 9 -45- No. Phenomenon Cause Countermeasure 2 Alarm for Err overflow/code: 1) Added excessive external force Operate within the specified range. 1-196 is generated. (including vibration) or impact load.

XLG Series

55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Since there are other applicable auto switches than listed, refer to page 9-14-11 for details.

PA3145/3165/3185

4 11 4 11 4 11 2 VPA3185 2.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions 3-Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145

5 Port Air Operated Valve Series VFA3000 1

(Valve in the initial stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF .

VFRA3000

(Value in the initial stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF.

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

SYJA300

ported: SYJA72-01(-F) 1/8,1/4 (A port) 2 x 3.2 (For manifold mounting) 25 25.5 SYA 12 SYJA 13 1.5 A 1 M5 x 0.8 (Pilot port) 23.5 11 VZA (Bracket) 48.7 VFA Manual override M5 x 0.8 (Pilot port) 2 x 4.5 (For mounting) 2 x 4.3 (For mounting) (External pilot port) (For solenoid valve) VFRA Manual override 2 x M4 x 0.7 (Mounting screw) 23.5 2 x 3.2 (For mounting) 11 VA A 1 (44) (36) 28 18 27 34

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

M Body Size Model A B C D E F G H I J K L M N ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 15.5 14.4 8.5 50 15 12.5 24 17.5 26 53 22.5 48 Metric size Inch size Collar part arrow 15.2 6 8 17.5 16.6 9.5 61 16 13.5 27 19.5 28 65 24.5 52 Transparent cover 57 8 10 18 18.5 11 21.5 65 29.5 21 17 69.5 27 14.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 19.7 17.7

Series SYJA300 3 Port Air Operated Valve

holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13 5 8.6 10 (P, A, R port) 3-M5 X 0.8 23 3.3-2 3 Port Air Operated Valve Series SYJA500/700 Model Valve model Actuation Port size Weight (g) Pilot port size Effective area (mm2) (Cv) SYJA512-M5 N.C. 3.6 (0.2) 45 Body ported M5 X 0.8 SYJA522-M5 N.O.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Air cushion 1/4 Double acting Non-lube (Both sides

Standard Combinations

How to Order (mm) A B C D E F G H I 30 03 RZ VHS Model VHS20 VHS30 VHS40 59 20 40 34 45 33 28 45 78 29 53 46 55 42 30 55 Residual pressure relief 3 port valve 107 39 70 63 22 58 44 36 63 Caution Body size 1. Consult with SMC when a pressure switch is installed on the outlet of pressure release valve. 2.

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

25

Mounting Wiring/Piping Caution Warning 11. Transition wiring of ionizer For transition wiring of ionizers, use a transition wiring cable for connection between ionizers. Use a power supply cable for connection between ionizer and power supply or external equipment. (Transition wiring is not possible with the IZS40.)

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Since there are other applicable auto switches than listed, refer to page 9-14-11 for details.

PSE100

Be aware that the output circuit is not active immediately after the power is connected. 3.1-12 PSE100 Dimensions A: Panel mount 56 l50 Gasket (Accessory) 7.4 l48 PRESSURE SWITCH 10 8 l 45 A Panel mount adaptor (Accessory) 55 11.4 Cover for display (Optional) 62 4 X 7.5 (= 30) 6.5 7.5 10-M3 2-M3 X 8L 30 View A Cutout dimensions for panel mount 65 or more 45 +0.6 0 +0.6 0 45 +0.6 0 N pieces

VXD21/22/23

Refer to Glossaryon page 17-3-15 for details of max. operating pressure differential and max. system pressure. 0.7 0.7 0.7 1.5 Solenoid Specifications Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C ) (Rated voltage) 4.5 45 3.2 35 6 55 7.5 60 6 50 8 60 11 65 9.5 60 11.5 65 Note) The return voltage is 20% or more of the rated voltage for AC and 2% or

VXF

4.5 60 45 35 55 45 35 55 60 50 60 Rated value 10 104 VXF 2150 83 LVC DC 6 VXF 2160 AC 50 20 11 4.5 60 6 DC Rated value 10 105 LVA 85 VXF 2280 AC 50 40 18 7.5 60 8 DC Rated value 10 108 LVH 85 LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-3-73 4 The VX series will be revised shortly.