Size: 3 (1/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø8, Sealant: w/o Sealant (M3,M5,U10/32), Option: C (Spatter Cover)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø8, Sealant: w/o Sealant (M3,M5,U10/32), Option: C (Spatter Cover)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10, Sealant: w/o Sealant (M3,M5,U10/32), Option: C (Spatter Cover)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø8, Sealant: w/o Sealant (M3,M5,U10/32), Option: None, Made to Order: None, Lock Nut: J (Round)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10, Sealant: w/o Sealant (M3,M5,U10/32), Option: None, Made to Order: None, Lock Nut: J (Round)

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

HRX-OM-W038

32 40 40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-O021

32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15

HRX-OM-R016

40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-R005

-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060-A-2060Hz 9.5.1 HRS060-A-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 1500 e e 40 40 32 32 1000 1000 25 25 20 20 5 500 5 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060-A-20-(BJM)) 9.5.2

Ionizer Nozzle type IZN10 Series IZS

(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

PSxx-OMV0008CN

-02-L2 0x0013 (19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

High Pressure Coolant Valve

Pilot solenoid valve 630 VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Dimensions Pg9 Applicable cable O.D. 6 to 8 Pilot EXH port 10(P2) Silencer installed (Standard) EBKX-L7004-040: VNH1, VNH2 AN210-02: VNH3, VNH4 Light/surge voltage suppressor (For DZ) Pilot SUP port 12(P1) Manual override (Non-locking push type) N P2 P1 Main port 1 (Back side port 2) U: Female thread for bracket

Brake mechanism added

10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

VXP21/22/23

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

VXD21/22/23

LVA LVH Connection 1 4 3 8 1 2 3 4 02 03 04 06 10 LVD Thread type Nil T F N Refer to the table (2) given below for availability. Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 LQ 32 40 50 For 32A For 40A For 50A Flange LVN Refer to the table (1) given below for availability.