One-touch Fittings Series KQ2

22.5 15.5 9.6 17.5 10 2.5 25.5 24.5 13.7 15.4 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32UNF 12.7 2.3 9.3 15.6 1 16 22 11.11 5 32 23 16 1 8 1 4 10.4 10 18 3 26 25 14.29 KQ2L05-32 10-32UNF 20 22 2.3 11.11 11.4 10 19.5 3 16 1 8 1 4 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 24 26 16.5 3.5 14.29 10-32UNF 2.3 18.1 13.6

VZ1000

connector (Station n)(Station 1) VQ7 (mm) EVS 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side

10

9 16.5 19 15 23 6 Width across flats 10 39 19 (4 locations) K (58) 25 19 8 Closed E 9 9 25 Open F 13 13 43 G 4 x M5 x 0.8 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-16DZ 40 45 60 28 68 98 128 26 98 MHL2-16D1Z 70 75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Digital Pressure Switch ( compatible)

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.

Vacuum Gripper

ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B

Air Catch Sensor

Switch assy O ring Gasket Base 3.8-4 ISA Dimensions/Centralized Wiring (Terminal Block Box Style) Unit Manifold With bracket Deflection level indicator Terminal block box 34 L2 40 34 L1 Deflection level indicator Terminal block box 75 40 90 10 10 10 Rc1/8 SUP.

Low-Speed Rotary Actuator

Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180

Suction cups with flange

ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12

Digital Pressure Switch ( compatible)

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

LUBRICATOR

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.

HRX-OM-Y120

ASCII code 5 characters Refer to 5.12.11 Communication example. | 0062h 10 decimal number 0 to 4294967295 16 hexadecimal number 0h to Fh 4 bytes 0063h upper level 0064h lower level 0064h 0063h Control board Program No. 10 decimal number 0 to 65535 16 hexadecimal number 0h to Fh 0065h Control board R Program version 10 decimal number 0 to 4294967295 16 hexadecimal number 0h to Fh 4 bytes 0063h

Table of Contents

Model A side B side JIS Symbol A relay output module of devices up to 110 A B is available for control VAC, 3 A. 4(A) 2(B) A B N.C. valve N.C. valve 3(EB) SOL.b SOL.a 1 2 SV A00 5(EA) B side passage symbol: Green B side manual override: Green Tie-rod base manifold (For SV1000/2000/3000/4000) 1(P) 4(A) 2(B) A side coil A side spool valve B side spool valve N.O. valve N.O. valve 1 2 SV B00

No more element replacement!

) OUT IN e e 150 r t B 120 327 188 (519) w w 84 OUT 2 x R1 r IN 53 DRAIN G1/4 Note Component Parts Dimensions (mm) A B Model Bore size (Nominal size B) No.

3 Port Solenoid Valve Series VQ100 1

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

3 Port Solenoid Valve Series VQ100 1

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the