Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

MGG

Dimensions Bottom 4-H (helical insert) 20 to 50 (mm) Bore size (mm) AF H 20 25 32 40 50 M5 x 0.8 depth 7.5 M6 x 1 depth 12 M6 x 1 depth 9 M8 x 1.25 depth 16 M6 x 1 depth 9 M8 x 1.25 depth 16 M8 x 1.25 depth 12 M10 x 1.5 depth 20 M10 x 1.5 depth 15 M12 x 1.75 depth 24 Dimensions other than the above are the same as those on page 17. 8-AF (helical insert) 45 Made to Order Specifications Series

PA3000/5000/PAX1000

0.7 Female mounting threads Thread depth 6 Silencer (AN120-M5) Option (PB1011 built-in solenoid valve type only) AIR SUP (pilot air supply port) Rc 1/8 FLUID IN Rc 1/8 9 11 22 13 SUP IN 11 18.5 32 EXH Foot bracket Option 45 AIR EXH (pilot air exhaust port) 2-M4 x 0.7 Female mounting threads Thread depth 6 M5 x 0.8 Thread depth 10 The PB1013 air operated type has a plug. 20 Related Products

70pvpump

0.7 Female mounting threads Thread depth 6 LVH Silencer (AN120-M5) Option (PB1011 built-in solenoid valve type only) LVD LVQ AIR SUP (Pilot air supply port) Rc 1/8 LQ FLUID IN Rc 1/8 22 9 11 13 LVN SUP IN 11 TI/ TIL 18.5 32 PA EXH Foot bracket Option PAX 45 PB 2-M4 x 0.7 Female mounting threads Thread depth 6 AIR EXH (pilot air exhaust port) M5 x 0.8 Thread depth 10 The PB1013 air operated

VEX1

X. c: The air in the tank flows into the upper cylinder chamber at a preset low pressure from the A port of VEXY Y,while the air in the lower cylinder chamber returns to the tank through VEXX X. d: Air returns to the tank through a throttled opening from the P to the A port of VEXX X. e: The air in the lower cylinder chamber is blocked at the P port of VEXX X,while the air in the upper cylinder

Hydraulic Cylinders

x 100l 115 x 115l 50 (M) 100 50 (M) M5 x 55l 140 CHKDB25 x 140l 75 (M) 55 5 (M) x 60l 165 x 165l 100 (M) 60 10 (M) x 65l 75 CHKDB63 M12 x 75l 5 (M) 65 15 (M) x 70l 80 x 80l 10 (M) 70 20 (M) x 75l 85 x 85l 15 (M) 75 25 (M) 10.4 x 80l 90 x 90l 20 (M) 80 30 (M) x 85l 95 x 95l 25 (M) 85 35 (M) x 90l 100 x 100l 30 (M) 90 40 (M) 16 x 95l 105 x 105l 35 (M) 95 45 (M) x 100l 110 x 110l 40 (M) 100

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Foot Pedal Type

MODEL VM2 SMC 54 71 177 152 Lock lever LOCK UNLOCK T.T. 2.5 (70) 30 18.5 11 B A XT34-60/67 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) Rc1/8 (Port 1) 14-E624 0.2 32 A 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 XT34-60/67 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) 3 x 6.5 mounting hole 53 XT34-67 (Without lock) 159 3 x 6.5 mounting hole MODEL VM2 SMC 54 71 177 152 T.T. 2.5 (70) 30 18.5

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

CRQ2

x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

0.5 0.88 6 M3 x 0.5 0.88 6 3 6 M3 x 0.5 0.88 6 3 6 12h9 2 2 2 MHK 1.5 M4 x 0.7 2.1 8 M4 x 0.7 2.1 8 4 8 M4 x 0.7 2.1 8 4 8 14h9 M5 x 0.8 4.3 10 2 M5 x 0.8 4.3 10 5 10 M5 x 0.8 4.3 10 5 10 16h9 MHS 1 9h9 3 3 3 1.5 6 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 M3 x 0.5 0.88 6 6 3 3 12h9 MHC How to Locate Finger and Attachment How to Mount the Attachment to the Finger Finger opening/closing speed: MHR2/

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

mounting hole Approx. 4 35 (L3) (5.2) 52 (L4) 73.5 Stations D side U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P

ZSE1/ISE1

x 0.8 (female) threaded.

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.