Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Motor Type: S2 (AC Servo Motor, Incremental Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 100mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Y (None)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Model: 504 (0.5 to 4.0 L/min), Thread Type: N (NPT), Port Size: 03 (3/8), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: N (None), Bracket: R (with Bracket), Operation Manual: Y (None)

Model: 504 (0.5 to 4.0 L/min), Thread Type: N (NPT), Port Size: 03 (3/8), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: N (None), Operation Manual: Y (None)

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Z (with Operation Manual)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6H (One-touch Fitting ø6mm, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Rotary Table/

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m 6 k C n c l o ni a u 8 r Mi im 3 n 1 o ti e ax ta ng ro m M u ra m ni Mi 180 n tio e C s ta l i o w c k ro m mu xi Ma Positioning pin hole Positioning pin hole Position

XL

Flange type Electrical entry Symbol Type Applicable flange size Nil 16, 25, 40, 50, 63, 80 63, 80 Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M D KF(NW) K(DN) Solenoid valve direction Left flange surface K L Solenoid valve action Rear flange surface Right flange surface Nil 2 position single 2 position double M W Note

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 m Nil 3 m L 5 m Z Solid state switches marked "" are produced upon receipt of order.

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Slide Tables MX Series

Front Mounting Top Mounting Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) l 5.5 7.5 10 11 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 l 6.5 8 9 9.5 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Work piece mounting Work pieces can be mounted

LJ1H

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Compact Guide Cylinder

L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 5 5 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 18 MGPK Series L L m m Plate Material Aluminum Alloy

Auto Switch Guide

L D-A73 (Example) CLQ Lead wire length MLGP 5 m None Nil L 0.5 m 3 m Z N RLQ Applicable for the connector type (D-C) only.

Speed Controller with Indicator

: Universal Type Seal method: Gasket seal For M5, 10-32UNF AS-FS AS-FSG Uni-AS-FS Applicable tubing O.D. d Y W1 D3 D1 M L3 L4 L5 A D2 L2 L1 T H (Width across flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-23 3.2 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8