Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

Air Cylinder Series MB

(Non-lube) 50 to 700mm/s 50 to 1000mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance Cushion Note 1) Both ends (Air cushion) JIS class 2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting Basic, Foot, Front flange, Rear flange, Mounting Single clevis, Double clevis, Center trunnion

Parallel Seal Type Slit Valve

Construction/Operation Bonnet ASSY Fig.1 6 - 3-1 Operation Figures 1 and 2B show the state in which Slit carrying the work piece is closed and Gate (Sealing material ) is not clamped (sealed) on Seal surface . In Fig. 2A shows Slit valve opens and Slit of the body is released. So it is a state where the work piece can be transported.

VEX-OMO0001

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 -2VEX-OMO0001 1 1 1 1 1 1 1 1 3 3 3 3) ) ) ) *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () -3VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / Nm , 1.5~2 1/6~1/4 2 (P.2.3) , (P.2.3) 1 1 1 1 P P P P 2 2 2 2 A A A A . . . . -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18

CE2

1 !2 !3 !4 !5 !6 !7 !8 !

CE2

1 !2 !3 !4 !5 !6 !7 !8 !

Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 !2 !3 14A 14B !5 !

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

VQZ100/200/300

VQZ300 Port size Symbol VQZ200 VZ 1 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc (PT)1/4 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VT (A) 2 N.O. 2 VT 1 (P) 3 (R) Note 1) Refer to p.2.10-18 for inch size Onetouch fittings. VP (A) 2 N.C. 3 VG 1 (P) 3 (R) Manual override (A) 2 N.O.

Cylinder Speed Checker

Description Note 1 +15 V 1 2 1 2 5 2 Output signal 1 D-F8N 3 4 3 4 Display part 3 GND Socket connector A-coded (Normal key) Plug connector A-coded (Normal key) 4 Output signal 2 D-F8N DD1677

Clean Air Filter SFD Series

(Nil) ID Case material Material Resin Aluminum Stainless steel Symbol 0 1 2 Port size Connection size Note IDG Symbol C04 C06 C08 C10 C12 02 N02 F02 4 6 8 10 12 IDK SFD100 only Clean One-touch fittings (KP series) Symbol 1 and 2 are made to order. For details, refer to page 325.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

1!7w !6ui e!5 CJ1 CJP CJ2 CM2 C85 !

P

ZR ZM Symbol 1 Pad dia. 02 to 08 ZH 2 10 to 16 3 20 to 32 4 40, 50 ZU ZL T 1 ZP A5 [qAdaptor] ZF ZP With Buffer ZCU Vacuum related T ZP 16 K20 A10 06 UGN [Pad model no.] Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [qAdaptor] Not used for 02 to 08 diameter.

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

Both ends (Air cushion) 1/8 1/4 3/8 1/2 Port size (Rc, NPT, G) CG1 Basic, Foot, Rod side flange, Head side flange, Single clevis, Double clevis, Center trunnion JIS Symbol Double acting Mounting MB Note 1) When requesting a cylinder without air cushion, cylinder utilizes rubber bumpers which increases cylinders overall length.

Pilot Operated 2 Port Solenoid Valve For Dry Air Series VQ20/30 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Pilot Operated 2 Port Solenoid Valve For Dry Air Series VQ20/30 How to Order Valves (Single unit) VQ A C6 2 1 1 1 G Series/ Orifice size Option Symbol 2 3 Nil: None Series VQ20 VQ30 F: With bracket Valve type (A) 2 N.C. 1 L: Type L (VQ20 only) 1 (P) Body type Note) If ordering both options, indicate LF.