Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

70pvpump

Note 16-9-5 16-10-1 Page 16-9-1 16-9-3 For details, refer to Best Pneumatics Vol. 16. 17-5-178 17-5-179

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

Rotary Table

Replacement parts (With external shock absorber type) Description Size 10 20 30 50 P891010-10 P891020-10 P891030-10 P891040-10 Seal kit No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

Electric Actuator / Low profile slider type

Origin offset-10 Origin 50mm Motor side End side 0 10 20 30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

Pin Clamp Cylinder Series CKQ/CLKQ

Lock Specifications Clamp Specifications Locking action Spring locking (Exhaust locking) Without shim With shim Clamp stroke 10 mm 0 0.5 Unlocking pressure 0.2 MPa or more 10 mm to 12 mm Lock starting pressure 1 pc.

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZS-27-01 847 Series PSE300 Specifications Model PSE3 PSE533 PSE543 PSE563 PSE531 PSE541 PSE561 PSE532 PSE530 PSE560 PSE564 PSE550 Applicable pressure sensor Set (differential) pressure range Setting/Display resolution Pressure range Note 1) 0.2 to 2 kPa 0.01 kPa 50 to 500 kPa 1 kPa 0.1 to 1 MPa 0.001 MPa 10 to 100 kPa 0.1 kPa For low pressure 0 to 100 kPa 10 to 0 kPa 10 to 101 kPa 0.1 kPa

mlu

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

Series 10-, 21- AW-B Filter Regulator

F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6

MLU

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

HRX-OM-M005

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Compact Guide Cylinder

16-10 stroke 56 43 89*2 20 36 22 25 25 42 26 30 32 48 32 38 40 54 41 50 64 51 63 78 56 80 91.5 69 100 111.5 84 20-20 stroke 73 58 114 25-20 stroke 73.5 59.5 116 32-25 stroke 100 69.5 137 40-25 stroke 100 79 50-25 stroke 113.5 88 63-25 stroke 113.5 92.5 80-25 stroke 129.5 110.5 100-25 stroke 151.5 119.5 *1: Bore size 10 *2: Bore size 15 *1: Bore size 10 *2: Bore size 15 Internal

JXCx-OMT0062

Refer to the electric actuators instruction manual for details. 41 - 10.

Digital Flow Switch (Remote type monitor unit)

x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard condition.

VQ7-6/7-8

8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Control equipment Symbol Nil A AP M MP F G C E Air filter with auto drain 10 stations 10 Air filter with manual drain Note) When equipped with control unit, one or two stations are used for mounting.

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

Plate Cylinder with Lock Series MLU

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when