Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Size: 1, Piping: P Side) (A, B Side) (E Side, Stations: 3 Stations, Base Specifications: Common Exhaust, A, B Port Size: 1, Thread Type: NPT

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Control Unit: -, Voltage: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Control Unit: -, Voltage: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Control Unit: -, Voltage: -

AS

1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch ttings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. 1 Fluorine grease is used. 2 The cleanliness class (ISO class) is 5.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

AS_FS Inline

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Compact Pad

Symbol) Pad type U (Flat) UM (Flat with groove) B (Bellows) 015 # 02 # 035 # 04 06 08 10 13 16 # # # # # # # # # # # # Sales unit 1.5 to 8 : 10 pcs. 10 to 16 : 5 pcs.

For Water Digital Flow Switch Series PFW

40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire Nil N Port size Size Applicable model Flow rate (l/min) Symbol Output specification 40 4 16 3/8 1/2 3/4 PFW704, PFW720 PFW720, PFW740 PFW740 03 04 06

AW20-B to AW60-B

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Body O.D.:98 06 Rc3/4 10 Rc1 Model Port size Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 XTO-2571 XTO-1239 XTO-1719

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

6 Body size If more than one option is required, write option part numbers in the order of K, N. 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size (1) 4 6 8 10 12 04 06 08 10 12 Electroless nickel plated (3) Brass PBT PBT/Stainless steel NBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated Elbow type Control method Meter-out Meter-in 0 With One-touch fitting

Process Pump

Note 2) Strong acidic chemicals, strong basic chemicals, and hydrofluoric acid are not allowed. 10 Specifications Model PA5010-04 PA5010-06 Actuation Automatically operated Main fluid suction discharge port Rc, NPT, G, Female thread 1/2 3/4" Port size Pilot air supply/exhaust port Rc, NPT, G 1/4" Female thread Body wetted areas PP Diaphragm PTFE Material Check valve PTFE, PP, PFA Liquid contact

Process Pump

In addition, since the exhaust air contains the gas components penetrating through the diaphragm, take measures to prevent the exhaust air from going to the solenoid valve. 10 Specifications Model PA5013-04 PA5013-06 Actuation Automatically operated Main fluid suction discharge port Rc, NPT, G, Female thread 1/2 3/4" Port size Pilot air supply/exhaust port Rc, NPT, G 1/4" Female thread Body

GA342

Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications VR Operating type Air operated type Type of actuation N.C./N.O.

GA342

3 Port Air Operated Valve Series VGA342 How to Order VGA342 04 A Passage Port size Thread type 04 1/2 06 3/4 10 1 A B Rc F G N NPT T NPTF Nil Normally closed (N.C.) Normally open (N.O.) Specifications Return mechanism Air + Spring Type of actuation N.C./N.O. (Changeable) Operating type Air operated type JIS Symbol N.C. N.O.

AS

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.