CG5-X6011

CD1 CD2 CL CP 0.500 0 -.002 0.106 2.28 1.94 NCDP-150-SUS 0.750 0 -.002 0.140 3.10 2.72 NCDP-325-SUS Note: Cotter Pins are included. 7 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard Noblesville, IN 46060, U.S.A.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QW printing QW 8150SZ Printed in Japan. D-DN

Direct Solenoid

"AC Only "' Not aveilable WDC Solnold Typo NVS 4024, 'm34 03 = 1'r0v 50Hz U = 2mV fiHz 07 = 24VAC ffiHz t09 = 115/120V 6OHz 100/110V 5OHz t10 = 23o/21t0V 60Hz?

99

{Rc3/8} FGH200-03 {Rc3/8} FGH300-03 {Rc3/8} FGH200 Series FGH300 Series 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure

Pressure Relief 3 Port Valve With Locking Holes

How to Order (1) Single action type VHS 40 04 A BS Made to Order Body size Thread type X1 Body: Red 20 Nil Rc 30 F G Option 40 N NPT Symbol Description 50 Nil K Handle color: Black Port size Body size R Flow direction: RightLeft Symbol Port size 20 30 40 50 Z Note1) psi as unit displayed on label 01 1/8 X Note 1) Only for NPT thread.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

VXA31/32

Construction/ Principal Parts Material Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Water (Standard) Air (Standard) Oil (Standard) (V, M) Maximum Minimum 40 1 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

HRX-OM-I051

(Only for HRZ010-W*S) 0, 15 to 40 LPM 0, 4 to 10.6 GPM 6 LOW FLOW 0, 8 to 40 LPM 0, 2.1 to 10.6 GPM (Only for HRZ010-W*S) 7 FLOW UNIT LPM, GPM Allows the selection of the unit of flow rate. 8 PRESS UNIT MPa, PSI Allows the selection of the unit of pressure. 9 SLAVE ADRS. 1 to 16CH Allows the selection of the slave address for serial RS-485 communication.

CY1F

10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

MIW/MIS

30 20 10 Transfer speed V m/min Transfer speed V m/min Allowable lateral load MIW20 MIS20 MIW12 MIS12 200 0.2MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 70 180 0.2MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 60 160 50 140 Lateral load N 40 120 Lateral load N Point of application L 30 100 20 80 Lateral load F 10 60 40 80 70 60 50 40 30 30 20 Point of application L mm 80 60 40 120 100 Point of application

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Vacuum Regulator

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MX printing OZ 12450SZ Printed in Japan. D-DN