SMC Corporation of America
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M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

VR1210-01 Model VR1220-02 1.0 MPa 0.05 MPa Max. operating pressure Min. operating pressure Min. pressure differential 0.05 MPa 5 to 60C (No freezing) SA Ambient and fluid temperature Effective area Port size Weight 7 mm2 15 mm2 VA 1 8 1 4 24 g 45 g SA How to Order VA 01 0 VR12 1 VM 01 Port size VR 1 8 1 4 02 JIS Symbol VH Nil Thread type VHS Rc NPT N G F standard 1 Body size 1 8 Construction

ALF400 to 900, ALT-5/-9 Series Operating Pressure Range Tank and line pressure How to Order ALF 40 02 0 (2) (1) Option Operating allowable range Operating allowable range Tank pressure (MPa) Nil R Auto Feed Lube Flow direction: Right to left Option Body size Port size Nil Description Applicable model Symbol 40 50 60 80 90 2 1 02 03 04 06 10 12 14 20 4 1 4 3 8 3 B With bracket

0 Semi-standard (option) ID200 Basic size Description Bracket Symbol Nil B Z 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04 06 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Gray (40) (4.1) (10) (8) (6.9) Black Red With power saving circuit Electrical Circuit (with power saving circuit) Power consumption is reduced by approximately 75% compared with the standard product by eliminating the need for electrical current for holding.

Af t er set t i ng t he sw i t ch, t i ght en t he sw i t ch cover i n t he reverse order of t he above procedure. ( Ti ght eni ng t orque 0. 6 t o 0. 8N m ) Setting of node address and com m unication rate Pl ease execut e t he set t i ng of node address and t ransm i ssi on rat e w i t h t he di p sw i t ch. 1 2 3 4 5 6 7 8 9 10 SW 40 SW 20 SW 10 SW 08 SW 04 SW 02 SW 01 BS4 BS2 BS1 Tabl

(L) N02(L) F02(L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D

. -11No.PS-OMW0009-C 2 About this product Centralized lead wire ISA-21Bracket for centralized lead wire ISA-20 Stations Model 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 Regulator AR20-02-1-B -12No.PS-OMW0009-C 2 About this product 2 port solenoid valve VX210X276 Bracket (when control unit fitted) (Nominal size:3 x 8, 2 screws) ISA-17 Spacer with bracket Y200T-A Modular adapter

45) 01-r,6NPr 02-TNPI 03-Stl.lPI 04_I'NPI N Pon thrEd Fluoro rubber E Fluororesin lining Fluoro rubber Fluoro rubber & Fluoro resin lining Port lhrad N-NPT F-PF _-Rc(Pn' *Special o.der only.

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

or more 50 or more 60 or more 32 or more 40 or more 48 or more 64 or more 6 8 10 12 1/4" 5/16" 3/8" 1/2" Recommended NG Fig. 2 When using a unifying band to bind together the pipes Precautions on Other Tubing Brands Caution 1.

0 Semi-standard (option) ID200 Basic size Symbol Nil B Z Description Bracket 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage Thread type 20 30 40 60 Symbol Description 02 04 06 1 4 1 2 3 4 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

AP100-02 500 Relief flow {l/min (ANR)} Dimensions 400 28 300 Panel cut dimensions 200 100 + 0 K P C U O 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 S L H 32.5 Set pressure (MPa) Note) The graph above shows the relief flow when the set pressure rises and falls from 0.1 MPa. 30 1.6 41 8.5 6.5 10 (69) 45.5 OUT IN 20 40 2 x 1/8, 1/4 40 758

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

AS1201F-M5, AS1211F-M5 AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 80 60 40 20 0 0 2 4 6 8 Number of needle rotations Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (

How to Order IBG1 0 02 Adjuster Symbol Type 0 Without adjuster 1 With adjuster Supply port Nozzle (Refer to page 4 for details.)

NmISE75(H)80 Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP