Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Coordinates and Moments z M3: Yawing MX MTS MY CY M1: Pitching y x MG CX M2: Rolling DStatic Moment -X Ceiling mounting Horizontal mounting Wall mounting 20Data M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

Thermo-con

Type Applicable model HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products HEC002-A5l-F HEC006-A5l-F Aircooled Option symbol N NPT Thread N HEC NPT thread The connection parts of circulating fluid piping, facility water piping and circulating fluid drain port are NPT thread type.

Low Profile Guide Type

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2 1 + A DC circuit AC circuit 1 1 (+, ) Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm SOL.

5 Port Solenoid Valve, Series VQC

VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.

HRX-OM-T002

(2/4) Alarm operations Alarm threshold and others A.RUN P.RUN A.STP Code Alarm name OFF Display Default setting Settable range Display Set temperature 1.0oC (33.8 o F) (-)5 1.034.0 oC (33.893.2 o F) Monitoring method Circulating fluid drop 0 03 AL04 discharge temp.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

15 3 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 536 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type With auto switch (Built-in magnet): MDHR3-15R A 3 x M3 x 0.5 thread depth 6 P.C.D.29 (Mounting thread) 21 24 MDHR3-15E Port Location 120 120 48 B 11 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port M3 x 0.5 Finger closing port M3 x 0.5 Finger opening

AIR COMBINATION

Keep the air flow within the rated flow to prevent an outflow of lubricant to the outlet side Note 4 When the compressor oil mist discharge concentration is 30 mg/m3 (ANR). Note 5Bowl seal and other O-rings are slightly lubricated.

AIR COMBINATION

Keep the air flow within the rated flow to prevent an outflow of lubricant to the outlet side Note2 When compressor oil mist discharge concentration is 30mg/m3 (ANR). Note3 Bowl seal and other O-rings are slightly lubricated.

VQ4000

Nil N T F Rc NPT NPTF G Combination of manifold options shown below and external pilot specification is not possible.

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Table of Contents - Tubing

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

LEC-OM02904

I/F DICOM CN3-5 DC24V(DC24V10% 150mA) DC24V CN3-10 DC24V I/F DOCOM CN3-3 EM1LG DC24V DC24V LG CN3-1 MO1MO2 CN3-11 SD 3 22 3 3.6 OFFON CPU () ON ON OFF OFF ON ON OFF OFF ON ON ON () OFF () OFF 1s ON ON () OFF 50ms 60ms () OFF 50ms 60ms .

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

Electric Actuator/Slider Type

Rubber back of the belt is softened and sticky f.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

48

How to Order Needle Valve/Flow Rate Characteristics 0 2 F A 1 AS 1 M3 X790 06 AS1201F-M350 45 40 35 30 25 20 15 10 5 0 0.5 0 1 1.5 2 2.5 3 3.5 4 4.5 5 6 7 8 Inlet pressure: 0.5 MPa Port size Push-lock type Body size Flow rate [L/min (ANR)] 1 M3 x 0.5 M3 M3 x 0.5 Applicable tubing O.D.