CLQ

50 47.5 43.5 48 44.5 41 42 40 6 51.5 13 44.5 8.5 47.5 9 47 63 50 54.5 51 54 48.5 47.5 50 50.5 16 43.5 9 46.5 12 46 11.5 80 60 61 64 58.5 64.5 57.5 63 56 19 12 52 15 49 14.5 51.5 100 71 74 70 74.5 67.5 68.5 80 22.5 15.5 65 18.5 58 18 61 60.5 100 28.5 75.5 24.5 68.5 21.5 71.5 71 24 21 Series CLQ Auto Switch Connections and Examples Basic Wiring Lead wire colors inside [ ] are those prior to

Compact Cylinder with Lock Series CLQ

50 47.5 43.5 48 44.5 41 42 40 6 51.5 13 44.5 8.5 47.5 9 47 63 50 54.5 51 54 48.5 47.5 50 50.5 16 43.5 9 46.5 12 46 11.5 80 60 61 64 58.5 64.5 57.5 63 56 19 12 52 15 49 14.5 51.5 100 71 74 70 74.5 67.5 68.5 80 22.5 15.5 65 18.5 58 18 61 60.5 100 28.5 75.5 24.5 68.5 21.5 71.5 71 24 21 Series CLQ Auto Switch Connections and Examples Basic Wiring Lead wire colors inside [ ] are those prior

PF-OMN0009_C

30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Air Cylinder

V 3 wire (PNP) M9P IC circuit 2 Wire M9B 3 wire (NPN) M9NW 12 V Solid state switch 3 wire (PNP) M9PW IC circuit Diagnostic indication (2-color indication) 2 Wire M9BW 3 wire (NPN) M9NA 5 V 12 V Relay, PLC Yes 24 V 12 V Water Resistant (2-color indication) 5 V 12 V 3 wire (PNP) M9PA IC circuit 12 V 2 Wire M9BA 3 Wire (NPN equivalent) A96 IC circuit Yes 5 V Reed switch No 12 V 100 V A93 Relay

2–4

A B Hs A B Hs Symbol 32 40 50 34 37.5 43.5 3.5 6 8.5 6.5 10.5 12 38 41.5 47.5 The dimension inside ( ) is for D-A72. 35 38.5 44.5 6.5 9 12 6.5 9 12 9.5 13.5 11.5 9.5 13.5 11.5 31.5 35 41 38.5 42 48 6 (6.5) 8.5 (9) 11.5 (12) 6.5 9 12 9 (9.5) 13 (13.5) 11 (11.5) 9.5 13.5 11.5 Bore size (mm) 9 Compact Cylinder/Guide Rod Type Series CQM The number of surfaces and grooves where an auto switch

CP95

38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13

CP95

46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 13 16.5 8.5 20 41 6.3 Operating port 2 x M5 x 0.8 Other dimensions are the same as basic type. 812 MXQ 1322Air Slide Table Dimensions: MXQ16 1322Basic Operating port 2 x M5 x 0.8 J I 12 Max. 12 (Retraction end adjuster) 5.5 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Refrigerated Air Dryers

IDF1E to 75E IDU3E to 75E p. 40, 41 Foundation bolt set For fixing the air dryer to the foundations. Easy to secure by striking the axle. Stainless steel IDF4E to 75E IDU3E to 75E IDF100F to 150F p. 41 Piping adapter For converting the thread type of an IN/OUT fitting for air dryers.

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Escapements Series MIW/MIS

x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 Individual -X 2.7 M8 x 1 12 4 15 11 40 36 2.8 9 26 14 M12 x 1.25 17 6 20 13 49 41 3.4 12.4 33 27 1429 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the auto switch in the switch mounting groove on the escapement from the direction as below figure.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

20Data 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 2.7 M8 x 1 12 4 9 26 15 11 40 36 2.8 14 M12 x 1.25 17 6 12.4 33 20 13 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

20Data 2.7 M8 x 1 10.5 12 4 12 34 26 2.2 9 22.5 10 2.7 M8 x 1 11 12 4 9 26 15 40 36 2.8 14 M12 x 1.25 13 17 6 12.4 33 20 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

, 16, 90+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 15+55 1.26 (1.30) 1.81 (1.86) 2.79 (2.84) 4.93 (5.08) 6.79 (6.99) n=2, 4, 6, 8, Flange 2 (Dif. / same side(s)) Standard weight 90 100 110 120 20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

, 16, 90+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 15+55 n=2, 4, 6, 8, 1.26 (1.30) 1.81 (1.86) 2.79 (2.84) 4.93 (5.08) 6.79 (6.99) Flange 2 (Dif. / same side(s)) 90 100 20 110 120 Standard weight 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16

KR

(mm) Model Applicable tubing M Weight (g) Applicable fitting size d Note) L A D KRR06-08 8 39.5 37 2.5 6 12.8 17 18.5 10.4 5.6 KRR06-10 10 4.0 9.3 KRR08-10 10 18.5 42 20 23 15.2 41 18.5 26.1 18.0 8 KRR08-12 12 4.6 33 KRR10-12 10 12 18.5 44.5 21 41.5 32.8 Applicable fitting size d Note) D: Max. diameter K Bulkhead Union: KRE M Effective area (mm 2) FR soft nylon FR double layer Applicable

Free Mount Cylinder for Vacuum Series ZCUK

20. 5 27. 5 41. 5 41. 5 41. 5 41. 5 42. 5 42. 5 42. 5 48. 5 ZMA DQ HQ HP 12 21 44 15 21 44 18 23 23 46 28 23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5