Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

IDUS/IDFS

/m3. ( ) Therefore, with an air flow rate of 3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 one-touch fitting 800 700 600 500

PA3000/5000/PAX1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Performance Curves/Built-in Solenoid Type/Air Operated Type 1l/min = 0.035SCFM 1MPa = 145psi Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

ZMA

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

MONOSASHI-KUN WITH BRAKE CONTROLLER

VFS210 AR425 Nylon 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 Nylon 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 Nylon 12/9 AN400-04 AS420-04 Please install the silencer responding to it necessary. 13 3.

CEx-OMQ0010

DC12~24V 1. 2. 3. 4. 2 CE2 ()CEU2 CEU1 CEU5 0.1mm 2-1 CE2+CEU2 CEU2 CEU2 8 CE2+CEU1CEU5 3 CEU1CEU5 9 2-2 2-2-1 C E 2 B 40 100 Z N R 40 40mm ( mm ) H 50 50mm () 63 63mm 80 80mm J 100 100mm K (mm) 2 S 1 40 25850 25700 n n 50 25800 25650 63 25800 25650 80 25750 25600 100 25750 25600 (mm) 40 1200 950 50 1150 900 63 1150 900 80 1100 900 100 1100 850 10 2-2-2 CEU2 NPN

pa

40 VDW Air consumption 100 l/min (ANR) Air consumption 200 l/min (ANR) 30 30 Air consumption 100 l/min (ANR) Air consumption 50 l/min (ANR) VQ 20 SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find the pilot air pressure and

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Digital Flow Switch Series PFA For Air Series PFW For Water

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Note2) ( ): Without sub-plate Note3) Model number for 5 port base mounted type without sub-plate is SYJA3 40. With Bracket Air operated valve part No. SYJA3 20-M3-F The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached.

CEx-OML0058

-03 AS4000-03 80 VFS440R VFS310 AR425 Nylon 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 Nylon 12/9 AN400-04 AS420-04 If the operating environment is dusty, select a model with bellows.

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80