MHF2-E Contents MHF2-12D MHF2-12D1 MHF2-12D2 Grease package part number Seal kit MHF12-PS MHF12-PS MHF12-PS 20, 21, 22 MHF2-D,D1 (12, 16, 20) GR-S-010 (10g) for guide MHF2-D2 (12) GR-L-005 (5g) for cylinder Contents MHF2-D2 (16, 20) Order No.
p8 p7 p6 p5 p4 p3 p2 p1 p0 PF3W720/520-;03 (at 16 L /min) Accuracy [% F.S.]
18 Line 19 OFF() () -70No.PS-OMV0003CN-G 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -71No.PS-OMV0003CN-G , (1015 ) -72No.PS-OMV0003CN-G ,, (), No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.
Applicable Auto Switches/Refer to pages 16 to 21 for further information on auto switches.
(0410)h to (041F)h Step data (No.1) 16 (0420)h to (042F)h Step data (No.2) 16 . . . . . . . . . . . . . . . (07F0)h to (07FF)h Step data (No.63) 16 Please refer to the example of the following in a detailed address of each step data.
Encoder initial communication error 1 16.7 Encoder initial communication Transmission data error 3 DB 16.A Encoder initial communication Process error 1 DB 16.B Encoder initial communication Process error 2 DB 16.C Encoder initial communication Process error 3 DB 16.D Encoder initial communication Process error 4 DB 16.E Encoder initial communication Process error 5 DB 16.F Encoder initial
Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.
.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 C8 Embedded type One-touch fitting Applicable tubing O.D.: 8 D-sub connector cable assembly VZS B Both sides Stations Symbol Passage Porting specifications 5(R1), 3(R2) 1(P) Common Common VFS 02 2 stations Symbol Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.
HRZD Series 5.3 Operation Screen 5-21 HRX-OM-M005 Chapter 5 Product Operation 5.3.13 Detail setting screen 1 1 2 3 4 5 6 Figure 5-30 Detail Setting Screen 1 Table 5-16 Detail Setting Screen 1 No.
Refer to the dimensions on page 20 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5
41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 10.5 14 SMC SMC 1/8, 1/4-2 port 3, 5 port 21 21 21 21 1/8, 1/4-2 port 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 3-11-15 16 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6
6 8 6.5 41 40 46 53 2.3 31 38.5 19 7 AV 10.5 54 8.5 50 54 70 2.3 35.5 42.5 21 7 8.5 10.5 54 56 50 70 2.3 37 42.5 21 7 AF800 AF900 13 65.8 11 70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length when the filter regulator knob is unlocked.
Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective
2-M6 x 1 thread depth 12 (Mounting hole) 34 45 24 27 30 8 2 +0.2 +0.1 17 26H9 +0.052 depth 3 0 30 40 21 4-M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting
Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 MHW2-32D Flat finger type (Standard) 24 MHZ MHF 2-M6 x 1 thread depth 10 (Mounting hole) 21 MHL 61.5 83.5 MHR 4-M6 x 1
21 Series MXP Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range MXP10/12/16 MXP6 Applicable bore size (mm) Auto switch model 6 10 12 16 Electrical entry from outside D-A9/A9V 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) A A D-M9/M9V/F9W/F9WV Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.
PV SV 16. Select communication speed (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.
PV SV 16. Select communication speed (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.
5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command:LOC Key-lock setting (R) . 5-19 5.8.5 Command:LOC Key-lock setting (W) . 5-20 5.8.6 Command:STR Saves data (W) . 5-21 5.9 Negative response . 5-22 Chapter 6 Communication alarm function
5.8.1 Command:PV1 Circulating fluid discharge temperature.5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R).5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W).5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19 5.8.5 Command:LOC Key-lock setting (W).5-20 5.8.6 Command:STR Saves data (W) .5-21 5.9 Negative response.5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication