Quick Exhaust Valve Series AQ

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 2 Note) AQ150 only AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F 554 Quick Exhaust Valve Series AQ Construction Specific Product Precautions AQ1500/1510 AQ2000/3000/5000 Be sure to read before handling.

Clean Room Rodless Cylinder Series CYP ø15, ø32

-ASD330F-01-08 10-ASD230F-M5-06 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Vacuum Ejector Series ZM

Cv value: 8.8 How to Order Ejector Manifold R ZZMA 06 06 R Common air pressure supply port (P) location Nil Both Sides R L Right Side Left Side Number of stations Right and left side are viewed from the front side of vacuum port (V). 01 1 station By viewing the front side of vacuum port (V), stations are counted starting from station 1 on the left side. 10 10 stations (max.)

CYP_EN

10-AS2301F-01-04-X214 Resin-body Universal type 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 One-touch (Restrictor) fitting 10-AS2301F-01-06-X214 mounted type 10-AS1001F-04-X214 10-AS2001F-04-X214 In-line type (Restrictor) 10-AS1001F-06-X214 10-AS2001F-06-X214 10-ASD230F-M5-04 10-ASD330F-01-06 Dual type (Speed controller) 10-ASD230F-M5-06 10-ASD330F-01-08 Note 1) See SMC Pneumatic Clean Series

Vacuum Regulator

thickness: Max. 3 34 15.4 x 5.4 One-touch fitting 83 Air 63 15.5 4.5 (mm) Fitting Part Dimensions 14.5 22 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 11 14 Elbow V Rc 1/8 Pressure gauge port 50 19.1 33.1 6, 1/4" 8, 5/16" 10 12 19 20 26 28 7.5 10.5 Pressure switch 5 Series IRV10/20 Dimensions/IRV20: Standard Connections 53 IRV20-lllG: With pressure gauge 2.3 2.3 Air VAC side 41

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Response Time/Weight Response time [ms](at 0.5 MPa) Model Pressure specifications Weight [g] Without light/surge voltage suppressor With light/surge voltage suppressor AC VP517Y Standard (0.2 to 0.7 MPa) 27 32 44 222 (With bracket: 257) High-pressure type (0.2 to 1.0 MPa) 41 48 44 VP717Y Standard (0.2 to 0.7 MPa) 41 48 50 413 (With bracket: 468) High-pressure type (0.2 to 1.0 MPa) 67 76 50

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2002FS-06 When connecting 4 pcs. and mounting L-brackets on both sides AS-20A Speed controller AS2002FS-06 4 pcs. 3 111 2 L-bracket AS-20L 2 pcs.

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

E-P HYREG ® Series VY1

VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg)

EXxx-OMU0020CN

(EX245-EA2-1) No. 1 SI ON/OFF 2 3 4 SI 5 . 11 11 No.EX-OMU0020CN 2. . 2-1 EX245 DC24 V 1 msec IP65 CE RoHS AC500 V1 FE DC500 V10 M FE -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 2 XYZ 3 () 147 m/s 12 No.EX-OMU0020CN 3. 3.1. 8 VQC4000 7 2 x M5 ( = 1.5 Nm) 2 x M5 (SI = 1.5 Nm) 4 x M* . 3-1 13 No.EX-OMU0020CN 3.1.1.

DOC1023125

Refer to the operation manual of the setting software for how to perform a trial run. 41 - Operation . Operation flow The startup procedure varies depending on the power-on situation.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.