MHF2-E

torque Nm (mm) MHF28D M3 x 0.5 0.63 4 MHF2-12D M4 x 0.7 1.5 5 MHF2-16D M5 x 0.8 3 5.5 MHF2-20D M6 x 1 5.2 6 Screw-in depth Model Bolt Max. tightening torque Nm (mm) MHF28D M2.5 x 0.45 0.36 4 MHF2-12D M3 x 0.5 0.63 5.2 MHF2-16D M4 x 0.7 1.5 MHF2-20D M5 x 0.8 3 When MHF2-8D* and MHF2-12D* are mounted body through-hole, use the attached special bolts.

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

70pvpump

) Option (PB1011 built-in solenoid valve type only) LVD LVQ AIR SUP (Pilot air supply port) Rc 1/8 LQ FLUID IN Rc 1/8 22 9 11 13 LVN SUP IN 11 TI/ TIL 18.5 32 PA EXH Foot bracket Option PAX 45 PB 2-M4 x 0.7 Female mounting threads Thread depth 6 AIR EXH (pilot air exhaust port) M5 x 0.8 Thread depth 10 The PB1013 air operated type has a plug. 17-5-167 28 Related Products: How to Order Process

VCB

8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

VCS

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold

Process Pump

For related products, refer to pages 11 to 13. Faulty sealing of the check valves or accumulation of dust may cause operation to stop, so slurry processing is not available. Note 1) The values given for discharge and suction head are for no piping. Values will depend on piping conditions.

DOC1019547

Description Material Note 1 Body A PBT 2 Body B PBT 3 Needle PBT 4 Indicator 5 Stopper Stainless-steel 6 Needle guide Brass Electroless nickel Plated 7 Disk seal HNBR 8 Stud Brass Electroless nickel Plated 9 O-ring NBR 10 O-ring NBR 11 O-ring NBR 12 O-ring 13 Seal NBR 14 Seal NBR 15 O-ring NBR Meter-in type only 13 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel

DOC1013369

Scale indication range Connection thread size M5 0~8 1/8 0~10 1/4 0~10 3/8 0~10 Connection Chamfer dimensionD(Recommended value) thread size 1/2 0~10 M5 5.15.4 The scale indication range is also printed on the product. 10-32UNF 5.05.3 (5) Tubing outside diameter (O.D.) of (6)-2 For R, NPT, G thread Tightening method Scale indication range When installing the connection thread, tighten it

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option

Air Gripper for Collaborative Robots

input 1 B10 12 15 S-2 7 OT0002 General-purpose input 2 A10 37 16 S-2 8 OT0003 General-purpose input 3 B11 13 17 OT0004 General-purpose input 4 A11 38 18 OT0005 General-purpose input 5 B12 16 19 The following tasks must be performed by the customer.

VER2000/4000

current) Electrical entry DIN terminal Manifold Model Accessory M5 x 45 VER2000 VER4000 AXT500-13 M6 x 53 AXT510-13, VER4-13 VER4-3P Mounting screw (With washer) Gasket Feed back plate Option VER2000 VER4000 Model Spacer type regulator (B port regulator) ARB210-00-B ARB310-00-B Can be made into manifold with series VV72.

CXWM/CXWL

8-26-14 13 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 10 With End Lock: CXWM10Stroke/50 to 100 R 2 x 2-M4 x 0.7 thread depth 8 2 x 2-4H7 depth 5 +0.012 0 2-RB0805-X552 2-M8 x 1.0 Adjusting bolt Shock absorber MX MTS 4-3.2 through Socket 4-6.5 counterbore depth 3.3 2-M5 x 0.8 Cylinder port 2-M5 x 0.8 plug (M-5P) 2-M5 x 0.8 hexagon socket head cap plug MY (Cylinder port

Compact Vacuum Unit Ejector/ Vacuum Pump System

M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

Series CE1

NTJ-015A NT-02 NT-04 NT-05 12 M5 X 0.8 4 8 9.2 7.8 H B 20 M8 X 1.25 5 13 15.0 12.5 32, 40 M14 X 1.5 8 22 25.4 21.0 50, 63 M18 X 1.5 11 27 31.2 26 Electrical Wiring Output style Input/Output The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

Digital Pressure Switch

M5 01 N01 C4H C6H N7H C4L C6L N7L Port size M5 x 0.8 R1/8 NPT1/8 4 mm One-touch fitting Straight type 6 mm 1/4 inch 5/32 inch 4 mm One-touch fitting Elbow type 6 mm 1/4 inch 5/32 inch Pressure-sensing part Silicon Materials in fluid contact Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR C3604 part (Electroless nickel Piping port POM, SUS304, NBR, C3604 plating), SUS304,

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

E-P HYREG ® Series VY1

VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg)

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

The handle of the M5 type is black zinc chromate plated.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

4 10 20 27 + Stroke 15.5 29 42.5 + Stroke 10 5 20 5.5 18 Note 3) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M8 x 1.25 47 1 25.5 10 36 Rod end nut 12 Flat washer 8 15 14 7 7 10 25.5 29.5 + Stroke 18.5 36 48 + Stroke 13 5 25 5.5 19 Note 4) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Size Foot bracket Description Mounting screws included in foot bracket 30 CRA1L30 Y1Z M5 0.825 50 CRA1L50 Y1Z M8 1.2535 Foot bracket 2pcs. 63 CRA1L63 Y1Z M10 1.540 Mounting thread4pcs. Collar 4pcs. 80 CRA1L80 Y1Z M121.7550 Size30 does not include collars.