Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 23 23 30 30 42 42 50 8.5 11 12 15 18 23 28 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 442 Series

Vacuum

E55: 3 wire (note 3) E16/17, E18/19:4 wire Types E16/17 3% F.S. or less (fixed). Lighting under ON condition (outpui 1: rd, output 2: green). Type E16/17 only. E14, E15, E55 types with plug connector do not utilize while wire.

Process Valve Series VNA

For DZ, the length is longer by 17 mm.

20

20.5 27.5 17 20.5 27.5 17 20.5 27.5 17 20.5 27.5 H06 H08 H10 H07 H09 H11 Metric size one-touch fitting Inch size one-touch fitting Note) Reference dimensions after installation RFKSS-GAP0030 Blow-gun with extension kit Customer supplied 10mm metal tubing cut to length ### 117.5 DHF10-02 H-10-02 156 KNH Series Nozzle is supplied with VMG Series Blow-gun Bill of materials Qty 1: DHF10-02 Qty

LJ1H

Do not perform the operation or setting of the product 17. When a surge generating load such as a relay or solewith wet hands. It may cause an electric shock. noid valve is directly driven, use a product that incorporates a surge absorption element. 3. Product with damage or the one lacking of any components should not be used. It may cause an electric shock, fire, or injury.

15

Allowable load mass on guides and moment Allowable moment [Nm] M1 1.3 2.6 8.6 17 30 67 96 Bore size (mm) Allowable load mass on guides m [kg] 6 10 15 20 25 32 40 M2 1.4 2.9 8.9 18 35 82 124 M3 1.3 2.6 8.6 17 30 67 96 9 15 35 60 104 195 244 The table above indicates the maximum performance of the guide, but does not show the actual allowable work load mass.

EXxx-OMY0006CN

Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (

PFxx-OMX0007

For IO-Link type, upper 6 digits are displayed and 103 or 106 or 109 turns on for accumulated flow rate. 17: Set the time for digital filter to the sensor input.

JXCx-OMT0062

Refer to the electric actuators instruction manual for details. 41 - 10.

EtherNet/IP TM Compatible Fieldbus System

When a manifold with more than 17 valves is used, by setting "1" (enabled) to 32 point switch diagnostic bit, a diagnostic error can be generated when SI unit switch is set to 16 point output by mistake. Refer to the figure below for the usage.

Vacuum Unit Ejector / Vacuum Pump System

Installation 17 3.1. Installation 17 3.2. Air Supply 19 3.3. Piping 20 4. Solenoid Valve 23 5. Pressure Sensor/Pressure Switch 29 6. Construction/Replacement Parts 30 6.1. Construction for Single Unit 30 6.2. Component Parts 30 6.3. Replacement Parts 31 6.4. Replacement Parts for Single Unit/How to Order 31 7. Exploded View of Manifold/Replacement Parts 35 7.1.

CRQ2

38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116 41 92 30 20 52 14

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5

Sine Rodless Cylinder Series REBR Direct Mount Type

8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Digital Flow Switch (Integrated display type)

Input of set values P2AH n2AH P2AL n2AL P2dH Setting of Setting of Setting of Setting of n2dH P2dL n2dL P2L/n2L P2H/n2H tnL/tPL P_2/n_2 tn/tP tnH/tPH H_2 H_t H2 Ht (Page 41) (Page 43) (Page 41) (Page 43) (Page 42) 4. Completed [F 2] Setting of OUT2 is completed. -39No.PF-OMM0005-N 1.

ZPT/ZPX

63 103 154 3.5 Model ZPX63HJ25-B01-A18 ZPX63HJ50-B01-A18 ZPX63HJ75-B01-A18 ZPX80HJ25-B01-A18 ZPX80HJ50-B01-A18 ZPX80HJ75-B01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-B01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-B01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82

Heavy Duty Stopper Cylinder Series RSH/RS1H

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41

LZ-OM003xx

F G H J Trunnion m ounting torque L[]ZB[]3L:13 15Nm /L[]ZB[]5L:20 22Nm tube as in drawing below. 0. 025 0. 061 0. 025 0. 061 Caution Trunnion pin Auto switch mount range 45 Mounting trunnion 44 Mounting foot D o Do not install the cylinder only by mounting it to 17 12.5 15 17.5 11 14 L[]ZB[]3 50 34 41 20 44.5 Model no. A C D E L[]ZB[]5 82 52 66 36 47 Model no.