XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

XMA/XYA Series

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

MRQ

motion, Rotary motion/Specifications CRB1 Linear motion Bore size (mm) 32 40 Piston speed 50 to 500mm/s CRBU Cushion With air cushion, Without air cushion Port size Rc(PT)1/8 CRA1 Rotary motion Output torque (At 0.5 MPa) 1Nm 1.9Nm 0.2 to 1s/90 CRQ Stable rotation time regulation range Cushion MRQ Allowable kinetic energy 0.023J 0.028J Order Made P.1.5-18 to 1.5-19 Port size Rc (PT)1/8, M5

2/3 Port Valve

216 219.5 237 260 222.5 240 263 229.5 247 270 55 63 74 VX Flange/32F, 40F, 50F Port size Standard/Vacuum pilot VN VQ Pilot port Rc(PT) Model Flange M L K J I H G F E D C B A 310.5 326 350 303.5 319 343 300.5 316 340 256.5 272 296 244 259.5 283.5 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 1 8 1 4 1 4 32 40 50 VNB5-32F VNB6-40F VNB7-50F 4.2-17

AWM20 to AWM40

.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1 40 5 27 37.5 37.5 63 40 160 73 26 26 AWM30

AWM20 to AWM40

.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1 40 5 27 37.5 37.5 63 40 160 73 26 26 AWM30

With Factory Installed

~ ( 0 '" co; Port size 1/8' 1/4 Gauge '" U'" ~N Drain 45 40 M5 X O .8 With differential pressure type auto drain Optional Specification yJ Metal bowl 45 IN-OUT reversal mounting (-R) specification 9 Filter I Regulator Series AW it (mm) AW3001 .

XLAQ/XLDQ

26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface Symbol Nil

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 15 M5 x 0.8 Body (Resin) A 23 1/8 11 A 32 1/4 14 16 Hexagonal flats D 14 45 1/4 16.5 17 58.5 3/8 20 Port size 21 68 24 1/2 2

High Vacuum L Type Valve

44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

High Vacuum L Type Valve

44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

IDX-OM-O004E

Reference 6.3 Outer dimensions [IDF15E1] Unit: mm 603 41 54 300 AIR OUTLET VENTILATION 16 AIR OUTLET THERMOMETER EVAPORATION WITH LAMP SWITCH C1 R AIR INLET RC1 87 DRAIN SEPARATOR 578 VENTILATION VENTILATION [AC200V] TERMINAL BLOCK 396 DRAIN TUBE LENGTH0.8m (O.D.10 43 15 270 13 4x 380 101 258 314 [AC100V] LENGTH1.9m POWER SUPPLY CORD [AC200V] (17) POWER SUPPLY CABLE ENTRY RUBBER GROMMET 6.4

High Vacuum L Type Valve

44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0003 6.

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

VZM500

Main valve/Rc (6A) Lubrication VA 1 8 Port size Pilot valve (EXH)/M5 x 0.8 Option Foot bracket (2) VM Weight (Basic) 130 g Please contact SMC for manifold mounting style. Note 1) External pilot type Main valve: 0 to 0.7 MPa Pilot valve: 0.15 to 0.7 MPa Note 2) The standard body can not be retrofitted with a foot bracket. VR VH VHS Model Actuator part no.

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 17 Stations, A B Port Size: M5 (Base Mounted M5X0.8)