Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) A, B port piping specifications Operating pressure range External pilot operating pressure range MPa SX3000 SX5000 SX3000 2 position single Pilot pressure range 2 position double P, R ports 0.25 to 0.7 Port size 3 position A, B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 C4 (4 One-touch fitting)/C6 (6 One-touch

Electromagnetic Digital Flow Switch

Lead wire with connector for copying ZS-40-Y Connect up to 10 slave units 10 LFE0 Series For the flow switch precautions, refer to the Operation Manual on the SMC website.

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2

VXZ

pressure differential (MPa) Av x 10 m Cv converted Max system pressure (MPa) Weight (g) PAX Water, Oil, Steam 2 -6 VXZ2362-10 0 0.7 0.6 0.7 0.6 0.7 0.6 290 12 215 1.5 1550 PB Note) Values for the grommet type.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Series VCS

) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCS3 14.4 (0.8) 0.5 (72) 5 1.0 (10) 24.8 (1.38) 0.2 (29) 7 145 (1450) 37.8 (2.10) 0.1 (14) 10 6.3 (0.35) 1.0 (145) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 10.8 (0.60) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.0 (145) 4 15.3 (0.85) 0.7 (101) 5 1.0 (10) 4 VCS4 24.8 (1.38) 0.3 (

Process Pump

Fluoropolymer Needle Valve Series LVN Specifications LVN20 LVN30 LVN40 Model Orifice diameter 4.4 4, 6 1/8", 3/16", 1/4" Metric Inch 10 10, 12 3/8", 1/2" 8 6, 8, 10 1/4", 3/8" Tube size Refer to Best Pneumatics No. 7 for further details.

1

14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25

Modular Type Air Filter Series AF

Contact P/A if an application under such conditions cannot be avoided. 10 One-touch fitting 10 One-touch fitting Parts list Material AFM20 Zinc die-cast AFM30, AFM40, AFM40-06 Aluminum die-cast Note Description No. Body 1 Platinum silver Replacement parts Part no. No.

ZSE30A(F)/ISE30A

ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 1 unit 2 units 10 units ZSE40 ISE40 ZSE10 ISE10 Master Slave (Max. 10 units) ISE70 Wiring example when using ZS-38-U Slave-side sensor Master-side sensor Slave-side sensors (up to 10 sensors) ZSE80 ISE80 Master-side sensor 1 unit 2 units n units (Up to 10 switches) Brown: DC+ PS DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC

30

M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCS3 14.4 (0.8) 0.5 (72) 5 1.0 (10) 24.8 (1.38) 0.2 (29) 7 145 (1450) 37.8 (2.10) 0.1 (14) 10 6.3 (0.35) 1.0 (145) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 10.8 (0.60) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.0 (145) 4 15.3 (0.85) 0.7 (101) 5 1.0 (10) 4 VCS4 24.8 (1.38) 0.3 (

VCB

90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class Orifice size mm Model Material Port size Body Seal 4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for heated water) 2 port

Series VCL

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

Multistage Ejector (N)ZL Series

10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction

25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

VCL

Please consult with SMC regarding other voltages. 3/4 (20A) Orifice size Electrical entry Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 G Grommet C Conduit Refer to the below table for orifice and port size combinations.