Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

Pin Cylinders Series CJP2/CJP

M3 AS1001F-23 3.2 AS1211F-M5-23 AS1311F-M5-23 M5 AS1211F-M3-04 AS1311F-M3-04 M3 AS1001F-04 4 AS1211F-M5-04 AS1311F-M5-04 M5 AS1001F-06 6 AS1211F-M5-06 AS1311F-M5-06 M5 For details about one-touch fittings, miniature fittings and speed controllers (applicable tubing O.D. 2 only), refer to the catalog ES50-25 (B edition or later).

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

mounting hole Approx. 4 35 (L3) (5.2) 52 (L4) 73.5 Stations D side U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P

Rotary Table/Vane Style Series MSU

Adjustment: Max.10.2 2 x M5 x 0.8 1.5 7 3 x 4H9 long groove depth 3 +0.030 0 B port A port 0.5 ( A , B , C ) 4 x M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 158 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

KS/KX

(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17

Rotary One-touch Fittings Series KS/KX

M D2 L A D1 NPT, R(PT) Nylon Urethane M5 0.8 M6 1.0 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 36.5 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 1 8 M5 0.8 M6 1.0 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Compact Proportional Solenoid Valve Series PVQ

Series PVQ10 Dimensions L plug connector PVQ13-L--M5 & + ! ! ' "()* % "#$ % ! ! ' ()* ( + #$ ( + Interface "#$ % & ' "()* % & ' M plug connector PVQ13-M--M5 , . & + ! ! ' "()* % "#$ % ! !

AS

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E KE Body size 1 AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

AS-FS

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

AS-FG

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 07 0.5 0.7 Applicable tubing O.D. Part no. KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 Symbol 1 2 4 5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)

SYJA300

) 2 x 3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P, A, R port) M5 x 0.8 23 1794 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With bracket F Nil Without bracket SYJA 2 5 1 M5 Body

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

VFS

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

AHC System Series MA

Disconnected state Disconnected state Disconnected state Connection/Operating port Disconnection/Operating port Operating port M5 x 0.8 M5 x 0.8 M5 x 0.8 Operating port (0.4 to 0.7 MPa) Positioning mark Positioning mark On the basis of the t dimension at the time of connection, move the AHC unit until the dimension becomes 0 to 2 mm larger.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.