Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Compact Cylinder

Auto Switch Internal Circuit D-A90(V) Contact protection box OUT () Brown Reed switch Unit: g Weight CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Auto switch model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93(V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93

CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Compact Cylinder Series CQS

Technical data 595 Series CQSS Proper Auto Switch Mounting Position (Detection at stroke end) Non-rotating rod a) b) Mounting 16 to 25 12 a) b) Mounting D-A9 D-A9V Hs Hs D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL Hs Hs Proper Auto Switch Mounting Position Auto switch model Bore size (mm) A B W B W A B A Hs Hs B A D-A9V D-M9V/M9WV/M9AVL D-M9/M9W D-A9 12 16 20 25 5.5 4.5 19.5 5.5 17 5.5 4.5 1.5

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Compact Cylinder

D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Auto switch part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

Plug-in/Plug Lead: Single Unit

For replacement parts, refer to page 2-6-43. 2-6-9 Base Mounted Series VQ5000 Kit (D-sub Connector kit) F . Simplification and labor savings for wiring work can be achieved by using a D-sub connector for the electrical connection.

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this P Regeneration option C terminal. D Connect the control circuit power supply.

VQ5000

For replacement parts, refer to page 2-6-43. 2-6-9 Base Mounted 10 Series VQ5000 Kit (D-sub Connector kit) F . Simplification and labor savings for wiring work can be achieved by using a D-sub connector for the electrical connection.

Series MLGP

D-P3DW D-P4DW D-Y59/Y7P D-M9AV D-Y7WV D-Y7W D-Y7BA Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 20 18.5 22 24.5 20 25 20.5 24 26 21.5 32 30 32 23 26.5 29 24.5 35 33 41.5 40 27 30.5 33 28.5 39 37 44.5 50 32.5 36 38.5 34 44.5 42.5 50 63 39.5 43 45.5 41 51.5 49.5 57 80 40 43 71.5 45 74 41 70 49.5 84 48 78.5 61 84.5 100 50 53 83 55 85.5 51 81.5 60 95 58 90 71 96.5 11-4.

3 Position Cylinder Series RZQ

38 27 37.5 40 46 33 45 34 47.5 30 42 35.5 43.5 28.5 40.5 31.5 31 43 27 39 50 46 47 35.5 43 36.5 48.5 32.5 41.5 38 44.5 31 44 34 33.5 29.5 40 63 49 40 50 39 46 41.5 51.5 36 44.5 37.5 47.5 34.5 47 37 33 43 D-A7H,A80H D-F7,D-F7F D-J79,J79W D-F7W D-F7BAL D-F7NTL D-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-F9V D-F9WV D-A7,A80 Bore size (mm) U U U U U U U U U U 32

RZQ

37.5 27.5 38 24.5 35 26 36.5 30 40.5 29 39.5 40 CC 27 39 31 43 31.5 43.5 28.5 40.5 30 42 34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U

Fieldbus system DeviceNet TM compatible SI unit

and Installation 19 Wiring 19 Setting and Adjustment 20 LED Display 25 Specification 27 Specifications 27 Dimensions 28 End plate Model Indication and How to Order 29 Summary of Product parts 29 Mounting and Installation 30 Wiring 30 Specification 31 Specifications 31 Dimensions 31 -1No.EX-OMN0030-D Maintenance 33 Troubleshooting 34 Parameter Setting 43 Parameter definition and setting 43

EXxx-OMN0029CN

No.EX-OMN0029CN-D TMSI DeviceNet // EX600-SDN#A EX600-ED# 3 9 10 12 12 15 15 17 SI 18 18 19 19 20 LED 25 27 27 28 29 29 30 30 31 31 31 -1No.EX-OMN0029CN-D 33 34 43 43 54 EDS 54 TM 55 RSNetWorx for DeviceNet 59 60 63 TM 65 DeviceNet 77 -2No.EX-OMN0029CN-D *1) (ISO/IEC)(JIS) *2) *1) ISO 4414 Pneumatic fluid power -General rules relating to systems ISO 4413

C95

85 70 60 25 D-F5/J5 1 10 2 (On different faces or same face) 15 130 125 120 95 75 70 25 D-F5NTL 1 10 D-F5 W D-J59W D-F5BAL D-F5 F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 75 70 25 10 1 Auto Switch Mounting Position and Mounting Height Reed switch Solid state switch Auto Switch Mounting Position Auto Switch Mounting Height D-F5, D-J5 D-F5 W, D-J59W D-F5BAL, D-F5NTL D-A5