Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPQR08-12 12 d 10 18.5 24 41 29 25.7 9 50.5 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

MK

ring Flange Hexagon socket head cap screw Piston rod y Except 12, 16 Except 12, 16 Bumper Ring nut Scraper pressure Rubber magnet u i o !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

PLC Fieldbus network Gateway (GW) unit Serial communication RS485 Up to 12 controllers are connectable.

Vacuum System Peripherals:

42 e Valve Model Fill in the blanks below with symbols of necessary specifications.

NCA1

2 1/4 4 2 1/2 1 3/4 2 1 1/2 -12 NCA1-1400 2 5 1/8 NI-1400 3 5 2 1/2 2 2 1/2 1 7/8 -12 NCA1-1401 2.5 6.19 NI-1401 3 1/2 5 13/16 3 2 1/2 2 13/16 2 1/4-12 NCA1-1402 3 6.25 Note) Retainer Rings are included NI-1402 3 1/2 6 1/8 3 3 3 1/4 2 1/2-12 42 Medium Duty Air Cylinder Series NCA1 How to Order Auto Switches Wire Lead Type Connector Type D D PC Lead wire length 0.5 (m) (1.64 ft) L 3 (m) (

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 82 88 12 14 26 12 M6 x 1 depth 9 21 100 st or more 25 25 25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

13 36 62 17 15 39 13.5 5 14 5 48 33 25 25 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 10 2.5 117 12 14 41 76 19.5 17 39 20.5 6 21 5 60 33 30 30 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 12 3 142 12 18 50 92 22.5 20 43 28.5 6 29 5 72 33 35 40 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 12.5 4 172 12 112 18 60 28 25 43 38.5 8 39 85 5 33 40 45 34 85 ( ) are the

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 39 13.5 5 62 17 13 36 25 14 25 48 33 5 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 117 10 2.5 12 17 39 20.5 6 76 19.5 14 41 30 21 30 60 33 5 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 142 12 3 12 20 43 28.5 6 92 22.5 18 50 35 29 40 72 33 5 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 172 12.5 4 12 25 43 38.5 8 112 28 18 60 40 39 45 85 33 5 34 85 ( ) are the

CXWM/CXWL

V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC F7PW J79W F7BA Water resistant

Environment

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

MK

3 I = m a2 12 I = m2 2r 2 5 4.1-21

JXCx-OMT0061CN

LED 8.1 LED LED LED PWR EEPROM EEPROM ALM L ERR CC-Link L RUN CC-Link 8.2 LED LED LED PWR ALM L ERR L RUN CC-Link CPU ROMRAM CC-Link CC-Link CC-Link CRC CC-Link () WDT EEPROM : LED EEPROM PWR) * () 28 - 9. 9.1 1 No.PLC No.PLC 6 PLC 12 12 1 *1 11.2 1 2 4 1 2 4 No. 9.2 / 9.3 9.4 1 6 12 9.5 *2 42 32 16 *1 12 9.4 (P.30) *2 / /PLC(CC-Link) 9.2 No.

New

12 15 20 22 24.5 24.5 27 29.5 32 32 42 53.5 58 61 30 32.5 35 35 28.5 39.5 44.5 47.5 3 15 1/2 Electrical entry Size Port size Faston DIN terminal Conduit terminal Conduit P type Q R S Q R S T Q R Q R 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 64.5 67 69.5 69.5 34 45 50 53 52.5 55 57.5 57.5 99.5 102 104.5 104.5 36 47 52 55 68.5 71 73.5 73.5 77 91 96 47.5 50 52.5 52.5 36 47 52 55 23 25.5 28 28 42 53.5

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

SFOD-OMT0009CN

11 () 12 () LE 1 800 1 1

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

a2 = m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18 18 58 64.5 M18 x 1.5 M18 x 1.5 44 1/4 12 12 114 108 62 19 17 155 14, 20 counterbore depth 14 18, 26 counterbore depth 18 (mm) Female rod end A1 8 8 12 13 18 18 MM M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24 28.6 12.4 1.2 55.8 1/2" NPT 1/2 23.8 21.7 28.6 12.4 35.2 49.5 1.2 55.8 22 R 1/2 24.5 62.9 24.5 62.9 AS421F-N04-13SD AS421F-04-12SD 49.5 35.2 22 12 20.9 142 142 Reference dimensions of M5 x 0.8, R threads after installation.