Body Size: 20A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: Standard, Attachment: Standard, Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

, Connection Diameter: 1/8, Pressure Gauge: [Not Provided] No Pressure Gauge, Size of Body: 20, Accessory: Without optional mounting parts, Set Pressure: 0.02 to 0.2 MPa, Pressure Unit: Nameplate and pressure gauge units: MPa, Custom-made Specifications: None, Handle Direction / Position: Handle downward

Manifold Regulator ARM1000/2000 Series

Connecting thread 01 male thread, M5 female thread 8 1 IN 1 OUT 2 2 OUT Thread type Nil N Rc NPT Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side. Note) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown.

IR1000/2000/3000

Description IR1000 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 IR1010 P362030-201 Bracket P36202028 P36201023 Pressure gauge234 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-2-01 G43-4-01 G33-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

AFF

X17 P.69 Port size X26 P.70 Symbol Size 2C Applicable body size Accessory Option 3 4C 8C 11C 22C Symbol Nil Description Symbol Nil Description 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 B Bracket 2 Rubber material: Fluororubber For medium air pressure (1.6 MPa) Drain guide 1/4 female threaded 4 F H J R S U T V 2 Bracket is included, (but not assembled).

IZN10_C

7 7 7-2. 2. 2. 2. 22 22 22 22 -2- 1. 1. 1. 1.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

1) Droop pulses ( 10V/10 pulses) (Note 1) Feedback position ( 10V/1 Mpulses) (Note 1, 3) Feedback position ( 10V/10 Mpulses) (Note 1, 3) 0 1 2 3 4 5 6 7 8 9 A C B Feedback position ( 10V/100 Mpulses) (Note 1, 3) Bus voltage ( 8V/400V)(Note 4) D Note 1.

NCQ8

") 2 NCDQ8A(B)-100T(M) NCDQ8A(B)-200T(M) 1 0.37 (3/8") 0.25 (1/4") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 0.37 (3/8") 0.37 (3/8") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 2 47 Series NCQ8 Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch D-A9 (V) Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures

7.5

0 o 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center 3 position closed center/exhaust center/pressure center 3 position exhaust center 2 4 (B) (A) 2 4 (A) (B) !1 q y w e r t o !

NCQ8

Stroke Symbol Stroke A C 1.06 0.36 1/8" to 1" 1/8" 1.63 0.46 1 1/4" to 2" 1/4" to 2" 075(3/4"), 106(1 1/16"), 150(1 1/2"), 200(2"), 250(2 1/2") N-through hole P-port Z H-thread C-depth 4 places Q J E M2 bolt circle W M1 I dia.

CATALOG VC10

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS 96 SERIES 70 FLOW CHARTS 400 400 SERIES 40 FLOW CHARTS 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Digital Flow Switches

OUT2 NC Sensor 8 Load 41.8 4 40.3 OUT1 40 4.3 Black Main circuit 7 3 Load Brown 6 2 + SMC FLOW SWITCH Blue 5 1 35.8 36 12 to 24 VDC Series PF2W5 A 40 UNIT RESET PF2W30-A SET Panel fitting dimension 3 x 7.2 (= 21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 Main circuit 7 3 Load +0.5 0 Brown 19.4 6 2 + Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2W5 PF2W31-A View A The applicable

Vacuum Module Series ZX

SP ZCUK Note 2) Dimensions : For mounting bracket A : For mounting spacer 1.

Free Mount Cylinder Series CU

Vertical Operation P2 W A P1 a (c) (b) P0 P0 a W A (1) Speed is controlled by meter-out circuit. Using concurrently the meter-in circuit can alleviate the stick-slip. (1) Speed is controlled by meter-out circuit.

Air Suction Filter ZFA Series

Cartridge type allows element replacement Application ZFA100 ZFA200 Note BP-1H-2A ZZFA2-01 For single unit One side Both sides For manifold (2 to 10 stations) (Both sides) ZZFA2Stations Note 1) BP-1H-1A ZZFA1-01 With Bolt, Nut, Washer ZZFA1Stations Note 1) Note 1) Enter a 2-digit number in the stations portion while referring to the example below.