For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

124.8 414.8 95.8 385.8 66.8 356.8 37.8 327.8 4.3-12 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve Dimensions Plug lead unit manifold (VV2Q32) VX VNl VQ Equation L1= (n1) X 37+56 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max. 20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

needle rotations Number of needle rotations Number of needle rotations AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) AS-FM AS-D AS-T ASP Number of needle rotations Number of needle rotations ASN Dimensions AQ (Hexagon width across flats) (Hexagon width across flats) Applicable tubing O.D. d ASV Applicable tubing O.D. d AK VCHC ASR ASQ A (2) L4

Speed Controller: Standard Type In-line Type AS Series

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

0.

.: 3.2, 1/8" 4, 5/32" 6, 1/4" C6: 44.1 N7: 47.9 (3.2) 15 1/8 [1(P), 3(R) port] 8 L4 L3 M5 x 0.8 [2(A) port] 2 x 4.3 (For mounting) L5 6.5 13.4 16.3 (8) 19.3 21.6 41.2 46.5 A 2 A 2 A 2 A 2 A 2 1 P R 3 59.3 43.9 35 1 P R 3 (5.5) (66) (35) + + + + + (4.5) Manual override (DIN rail) Approx. 300 44.9 5.5 5.5 (Lead wire length) (Pitch) P = 10.5 M5 x 0.8 (PE: Pilot EXH port) 16.5 (DIN rail clamp

5 Port Solenoid Valve Series VQZ1000/2000/3000

L5 73 62.5 38.5 17.5 30.5 927 Series VQZ1000/2000/3000 Dimensions: VQZ2000 VV5QZ22C Stations U side D side One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 45.5 (For M5) 13 8.5 L4 L3 Grommet (G) 5 L5 Manual override M5 x 0.8 [4(A), 2(B) port] (8) 1/8 [1(P), 5(R1), 3(R2) port] (5.5) 16.5 31.5 44.5 31.5 12 23.5 30 Approx. 300 (Lead wire length) 120.4 R1 5 P 1 R2

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet (G) 24.5Mounting holes (5.5) 30 (7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2 A 2 Manual override 5 SY SMC 4 (L4) (L3) SYJ L2 L1 P=16 P=16 15.5 3 2 VK 1 18 VZ Station

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 D3 L4 Max. Min. Max. Min.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

size VVPA460Station 2Port size 34 2 x 18 Port size (1) Pilot port Pilot port 18 2 x 2 x SYA SYJA VZA VFA VFRA 4 x 13 Mounting hole VA 18 Pilot port 12 34 4n x , 34 2n x Port size (1) Port size (3/4, 1) L Dimension n n: Station Formula 2 257 10 953 7 692 8 779 9 866 3 344 4 431 5 518 6 605 Model L L1 VVPA450 L2 307 394 481 568 655 742 829 916 1003 L3 306 954 414 522 630 738 846 VVPA460 L4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3) L2 L1 2 P = 20 P = 20 19.5 1 23 9 Courtesy

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

15 16 17 18 19 20 41 54 75 85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1 L2 L3 L4

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

2 Meter-out type Meter-in type 638 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Dimensions: Elbow Type Seal method: Gasket seal For Uni thread Indicator window direction: 0 Indicator window direction: 180 W1 X W2 Y D3 AS-F AS-F Applicable tubing O.D. d TMH ASD AS L3 A L4 D1 AS-FE KE AS-FG L2 L1 M1 AS-FP H (Width across flats) T AS-FM Metric Size [mm] Model d T H

Compact Vacuum Unit

Note 12) Lead Wire with Connector for Vacuum Pressure Switch Nil Without option Nil G Without lead wire with connector (No need to specify for pressure sensor type. ) Lead wire with connector and connector cover, Lead wire length 78.7 inch (2 m) With bracket for single unit (Enclosed with the product for shipment without being assembled) B Vacuum (V) Port Note 11) Bracket C2 C4 N1 N3 L2 L4

Compact

L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load

VZ3000

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

0.01

ZSM1 With DIN rail L1 5 38 3 38 L2 LED level meter Lead wire connector End plate L EXH port EXH port End plate R 3 0 3 0 3 0 center DIN rail 92 Setting dial P P P T T T U U U E E E L L L S S S L L L 20.5 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge Rc, NPT, G 1/8 SUP port Plug DIN rail mounting bracket 24 L3 11.2 5.3 L4 L5 n Stations

EX500

TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 1 2 3 4 5 6 7 8 Stations Rail length L1 110.5 123 148 173 185.5 210.5 223 248 Mounting pitch L2 100 112.5 137.5 162.5 175 200 212.5 237.5 Manifold length L3 L4 82 102 122 142 162 182 202 222 12 12 12.5 12.5 13 13

KB

Removal is complete. 15-2-112 Piping Module Series KB Air Output Port 1 Elbow Module: KBV Applicable tubing O.D. 4 Weight (g) D1 D2 D3 L1 L2 A M L3 L4 Model KBV1-04 KBV1-06 KBV2-06 KBV2-08 KBV3-08 KBV3-10 KBV3-12 KBV4-12 KBV4-16 16.8 22.0 24.0 25.0 28.5 29.5 31.5 34.0 35.0 39.0 4.3 4.9 7.3 8.3 15.0 17.5 19.3 20.2 36.4 10.4 13.6 16.0 19.5 33.0 10.4 13.0 6 12.8 17.0 17.6 22.5 36.0 10.1 15.5