MXF

M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8

Digital Gap Checker

Spacer 1 Stations Part no. 2 ISA-16-2 3 ISA-16-3 4 *1 ISA-16-4 5 ISA-16-5 6 *1 ISA-16-6 w Seal for extra station ISA-15 e Threaded plug with seal ISA-12-m 1 pc. Piping Part no. Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

MXW

2 !3 !4 !5 !6 !7 !8 !

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO2) With n surface "= 1.2.3,4 , n=2,4,6,8 ... n=2.4.5.e .. 1'1 =2 .4 ,6 ,8 ... switches Same 5.S+~1'l2) 7S+,5O(n-2) ao. 5O(1l-2} 90+50(n-2) ""F ttl surface

MHK2

Refer to Effective Gripping Force for the gripping force at each gripping position on pages 12-6-7 to 12-6-11. P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

MHK2

2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

Round Type Hydraulic Cylinder

3, 4, 5) 20 + 35 D-M9V 5 20 35 CHS (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9V 5 15 25 CH2 (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 10 20 35 CHA (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 15 + 45 (n 2) 2 D-H7/H7W D-H7NF/H7BA 60 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 60 Related Products (n = 2, 4, 6) Note 3) 15 + 45

Ionizer Nozzle type IZN10 Series IZS

IZH A 5 8 7 Piping port M3 x 0.5 thread depth 4 (Tap for ground wiring) 40 25 3.5 93.6 Energy saving static neutralization nozzle with right angles IZN10-0106--X367 3.4 6 12 8 6.5 Section A-A Air blow port Air blow port 2 x M3 x 0.5 thread depth 10 26 32 12 11 2 x 3.4 6/For elbow 1/4"/For elbow 1/4" 11.5 12 24.5 22 7 18.5 16 10 10.3 Refer to page 457 for dimensions of the model with bracket

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram Power supply terminal block PCW-EC16Z00 PCW-EC16Z01 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS0) 0 1 2 3 4 5 6 7 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 9 8 7 6 5 4 3 2 1 0 F E D C B A 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2 1 CN9 4 3 2 1 CNA 4 3 2 1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !



(Mounting hole) (Mounting thread) 4-M6 x 1 x 6 Rc 1 1/4 2-Rc1, 1 1/4 VEX1930 3-14, 20 Bracket (Option) Pressure gauge (Option) Air operated type Rc 1/8 2-M5 x 0.8 Rc 2 2-Rc 1 1/2, 2 4-M6 x 1 x12 (Mounting thread) (Mounting hole) 14-6-10 11 Precision Regulator Series VEX130 3 Base Mounted M5, Rc 1/8 VEX1B33-M5, 01 F.R.L.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

4-channel Flow Monitor ( compatible)

System error (Er0, 4, 6, 8, 40) is displayed. (2) Check if the power supply voltage 6 is in the range 12 to 24 VDC 10%. (2) Supply power in the range "HHH" is 12 to 24 VDC 10%. displayed. (1) Reset applied flow to a (1) Check if the flow exceeds the level within the set flow range.

Ionizer

x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

Transfer

1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

2 !3 !4 !5 !6 !7 !8 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

2 !3 !4 !5 !6 !7 !8 !