Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead [mm]: LEJS40, 16mm; LEJS63, 20mm, Stroke: 300mm, Motor Option: w/o Option, Vacuum Port: Left, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: -, I/O Connector: -

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead [mm]: LEJS40, 8mm; LEJS63, 10mm, Stroke: 300mm, Motor Option: w/o Option, Vacuum Port: Left, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: -, I/O Connector: -

Accuracy: High Precision Type, Size: 40, Motor Type: 100W Output, Absolute Encoder, Lead [mm]: LEJS40, 16mm; LEJS63, 20mm, Stroke: 600mm, Motor Option: w/Lock, Vacuum Port: Both Left and Right, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: -, I/O Connector: -

Series: 25A-LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, LECSA, Lead Screw: LEFS25: 6mm, LEFS32: 8mm, LEFS40: 10mm, Stroke: 800mm, Motor Option: w/Lock, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Cable Length: 2m

Table of Contents

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

EX120/121/122

) Vibration resistance 98 m/s2 in each X, Y, Z direction, 3 times (De-energized) Impact resistance Standard CE marking, UL (CSA) Tie-rod 2 pcs.

Digital Flow Switches

Mount the switch in a location where there is no vibration (Display: greater than 98 m/s2, Sensor: 4.9 m/s2 or less), or no impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

NCQ2/CQ2

Series CQ2 Stroke S2 Stroke S1 B L 1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range B A 1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

Compact Cylinder

Series CQ2 Stroke S2 Stroke S1 L B1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range A B1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

V100

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

The operating time for D-J51 is 2 ms or less and for D-P3DW/P4DWL is 40 ms or less. 4) 980 m/s2 for the trimmer type sensor section, 98 m/s2 for the amplifier section.

Digital Flow Switches

Mount switches in locations where there is no vibration greater than 98m/s2, or impact greater than 490m/s2. 3. Do not use in an area where surges are generated.

PF2A/PF2W

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

Metal Seal/Rubber Seal Series VQ Body Ported

S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Do not drop, bump, or apply excessive impact (PSE530, 540: 980 m/s2, PSE560: 500 m/s2, PSE550: 300 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is PSE530: 23 N, PSE540, 550, 560: 50 N or less. Applying a greater pulling force to it can cause malfunction.

Digital Flow Switches, Series PF2A, Series PF2W

10 to 500Hz at whichever is smaller: 1.5mm amplitude or 98m/s2 acceleration in X, Y, Z directions for 2 hrs. each Vibration resistance 490m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 410g 470g 650g 1,100g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3

Electric Slide Tables

Acceleration/Deceleration: 5,000 [mm/s2] It is possible to obtain an approximate cycle time by using method 1, but if a more detailed cycle time is required, use method 2. W 200 Cycle time: 0.5 seconds Method 1: Check the cycle time graph.

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Base Mounted Metal Seal/Rubber Seal Series VQ

S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 F F U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable