PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

Digital Flow Switch ( compatible)

Delay time Setting of dtH1(ON) dtL1(OFF) (page 48) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 51) 6. Completed [F 2] Setting of OUT2 is completed. -46No.PF-OMZ0002-A Press the UP or DOWN button in function selection mode to display [F 2]. Press the SET button. Move on to output mode setting.

PFxx-OMU0002

For details, please refer to switch output (OUT) value and hysteresis are set within Zero cut-off range (page 49). 48 No.PF-OMU0002-D When the set value and hysteresis of the switch output (OUT) is set within the zero-cut range. The operating point of the switch output will be changed, depending on the zero-cut setting value.

Digital Flow Switch (Remote type sensor unit)

PF2A510 1 10 PF2A550 5 50 PF2A511 10 100 PF2A521 20 200 PF2A551 50 500 -22No.PF-OMO0010-C Dimensions (in mm) PF2A510/550 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3 mm -23No.PF-OMO0010-C PF2A511/521/551 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3

Digital Flow Switch (Remote type sensor unit)

. -24No.PF-OMO0014-D Dimensions (in mm) PF2W504/520 Output specifications A B C Output for PF2W3 48 mm 62 mm 94.3 mm Output for PF2W3 + Analogue output 58 mm 72 mm 104.3 mm -25No.PF-OMO0014-D PF2W540 Output specifications A B C Output for PF2W3 48 mm 62 mm 94.3 mm Output for PF2W3 + Analogue output 58 mm 72 mm 104.3 mm -26No.PF-OMO0014-D PF2W511 Output specifications A B C Output for PF2W3

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

LFE-OMZ0012

2.5 depth 8.5 2 Approx. 45g LFE14(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE26(Z) 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38(Z) 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g NOTE) If you are installing directly, choose the self tapping screw in depth is to 8mm.

LFE-OMZ0013

the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting of OUT1 22 F 2 Setting of OUT2 30 F 3 Response Time 36 F10 Sub screen display 37 F20 External input 41 F22 Analogue Output in free range 42 F30 Accumulated flow value hold 44 F80 Power saving mode 45 F81 Security Code Request 46 F82 Input of line names 47 F90 Setting of all functions 48

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

hole Pilot port IN port OUT port 30 R0.2 230.05 22.50.05 M26 x 1.5 3.8 hole 240.05 220.05 C1 30 30 30 2.5 8.5 32.70.05 40.50.1 480.1 550.05 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3. 11 VCC Series Dimensions Single valve unit VCC12(D)-02(F) 38.7 16.5 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48

DOC1001322

Indication Item Explanation Reset Data reset Set values are reset to default settings. (1) All Setting 5.4 Description of the Screen HRS Series 5-48 DOC1001322 Chapter 5 Display and Setting of Various Functions 5.4.9 Communication setting screen A screen for shifting to the following setting screens is displayed if [ ] button on the menu is pressed.

HRX-OM-W060

AL36: Maintenance alarm (2) Maintenance Operation continues during the alarm By default 5.4 Description of Screen HRL Series 5-48 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions TEMP OUT signal 4. Set TEMP OUT signal.

HRX-OM-Y098

Set time: 0 secthis function is Disabled Pump operation sustainable time CH1 0 to 9sec (2) Time 0sec CH2 By default 5.4 Description of the Screen HRL Series 5-48 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions About continuous pump operation function This function allows just the pump to continue operating after some alarms are activated.

HRX-OM-X010

Figure 5-48 Mode Selection screen 5. Press the [ENT]key. HRZ Series 5.4 Examples of System Operation 5-39 5-39 HRX-OM-X010 Chapter 5 System Operation 5.4.3 Example 3: PUMP IV is switched from FLOW to FREQ. POWER ON Figure 5-49 Swiching of pump operation from FLOW to FREQ 1. Press the [SEL] key to display the Menu screen. Figure 5-50 Menu screen 2.

XL-OMY0002

80 100 160 H4100 XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 (2 ) (3 H5120 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48

XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

XMD/XYD Series

L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38

XMH/XYH Series

A E Table 6 Unit:mm Model n J XYH-25 100.2 75.8 48 1 23.5 40 26 41 21.5 XYH-40 130 102.5 66 2 38 55 41 57 30 XYH-50 178 119 79 2 53 75 52 70 35 8 XM-OMP0005-A 6.

MX-OMP0051

48 MXQ20(A) 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 22.9 23.9 23.9 23.9 29.9 38.9 63.9 63.9 63.9 MXQ25(A) 34.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 30.7 29.7 29.7 29.7 42.7 42.7 28.7 67.7 67.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4 7.4 3 13.6 13.6 19.6 36.6 13.6 MXQ8B 29 13.9 13.9 13.9 13.9 13.9 13.9 4 11.1 11.1 19.1 19.1 38.1 38.1

CEx-OMG0106

When the input, value is blinking, press READ once to shift the operation back to P1. 48 11-2 Program Setting Input desired cylinder positions. 11-2-1 Input Method Turn the controller switching mode to PROGRAM. Note: Step 0 for every program is END. Program no 1 will start blinking. Set the program no. through UP & DOWN buttons. Program No.