Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

PF-OMN0011_C

min (20 L/min 0) 7112 L/min (7 L/min 0) 3.545.0 L/min (3.5 L/min 0.0) 1.718.0 L/min (1.7 L/min 0.0) 0.354.50 L/min (0.35 L/min 0.00) 0.354.50 L/min 1.718.0 L/min 3.545.0 L/min 7112 L/min 20280 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse L/minL 0.5F.S. 0.5F.S. 0.5F.S. 0.5%F.S.(25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Features 1 In-line Air Filter Filter Variations Flow rate under vacuum condition Flow rate under positive pressure Series AF AF10 AF20 to 350 L/min (ANR) For positive pressure For vacuum pressure to 100 L/min (ANR) to 350 L/min (ANR) ZFC77 Flexible mounting orientation Easy to install to the line Spacesaving to 20 L/min (ANR) to 100 L/min (ANR) ZFC54 to 100 L/min (ANR) ZFB ZFA to 200 L/min

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

DIN terminal Type Y conforming to DIN43650C standard is also available. (For details, refer to catalog in page 80.)

MHF2

Hmm 0.7MPa 0.3MPa 0.3MPa 60 0.7MPa 60 0.4MPa 0.4MPa 40 40 20 20 100 80 60 40 20 0 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 3 Series MHF2 Confirmation of external force on fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(

Series SY100 3 Port Solenoid Valve Rubber Seal

VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ... Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold.

ZQ-OM01401

L 1. (b ) 2. R 3. L 4.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) Flow Characteristics Flow Characteristics ZM10H ZM13H Exhaust Characteristics Exhaust Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa

PF2A

Specifications PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 Air, Nitrogen Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 2.5 to 52.5 l/min 2.5

VS 8-2/VS 8-4

kit with 0.6 m lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !

HRX-OM-M005

Max.50 Standards Ionic silica (mgSiO2/L) Max. 50 Max.30 Iron (mgFe/L) Max. 1.0 Max.0.3 Copper (mgCu/L) Max. 0.3 Max.0.1 Sulfide ion (mgS2-/L) Not be detected Ammonium ion (mgNH4+/L) Max. 1.0 Max.0.1 Residual chlorine (mgCl/L) Max. 0.3 Max.0.3 Free carbon dioxide (mgCO2/L) Max. 4.0 Max.4.0 Filtering (m) Max. 5 * According to the Water quality guideline for refrigeration air-conditioning equipment

Precision Regulator Series IR1000/2000/3000

min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 11.5 l/min (ANR) or less (At supply pressure of 1.0 MPa) SRF Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/4, 3/8, 1/2 Port size Rc 1/4 Rc 1/8 Rc 1/8 (2 locations) Pressure gauge port ARX20 Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 Mass (kg) 0.30 0.14 VCHR Note 1) With the condition of no flow

Low Profile Air Gripper Series MHF2

Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 450 Low Profile Air Gripper Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

cable. 1-5-11 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B 34.4 G: Approx. 300 H: Approx. 600 (Lead wire length) 78.8 [83.2] (Light/Surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3240-L-M5 M8

Rubber seal 5 Port Solenoid Valve Series SYJ7000

entry L plug connector D DO With connector Without connector DIN terminal 3 Note) Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

LFE-OMZ0013

Set point range 0.4 to 24.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume per pulse (Pulse width=50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Display unit Instantaneous flow L/min, accumulated flow L Accuracy Display value: 0.5F.S. Analogue output: 0.5F.S. Repeatability 0.5%F.S.

ZQ-OM01301

of X, Y, and Z respectively (not energized, initial value) Vacuum ejector system specifications Item ZQ05A ZQ07A ZQ10A Nozzle diameter [mm] 0.5 0.7 1.0 Standard supply pressure [MPa] 0.35 0.43 Max. vacuum pressure [kPa] Note 1) -80 Max.suction flow[L/min (ANR) ] Note 1) 5 10 22 Air consumption [L/min (ANR) ] Note 1) 15 25 47 Vacuum Supply pressure supply (PV) port 0.3 to 0.5 pressure range

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C