Cylinder Port: TF (G), Arm Opening Angle: 135°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A029 (25mm Offset Machined ref NAAMS ACA131M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 120°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A068 (120mm Offset Machined ref NAAMS ACA174M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 135°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A069 (120mm Offset Machined ref NAAMS ACA175M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Plug-in manifold for VQ1*0* valve, Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING .85034 lb

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

MQQ

P-80 (N)

AMP

P-80 (YG)

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Air Slide Table Series MXQ

With end lock (R) Functional option Axial piping type (P) For detailed specifications of adjuster options and functional options, refer to option specifications on pages 3 and 4. Standard Strokes Order Made Order Made Specifications Model Standard stroke (mm) For order made specifications of series MXQ, refer to page 42.

OMU0023

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B

PSxx-OMT0001CN

-14No.PS-OMT0001CN-E 2 (ISA3) ISA3-F ISA3-G ISA3-H (5 m ) 0.010.03 mm 0.020.15 mm 0.050.30 mm () 1 060 2 10300 2 30500 2 () 1 1 100200 kPa OUT1 OUT2 5 () 3 -20220 kPa 0.005 mm 0.010 mm 0.020 mm (25 ) 0.010 mm 0.015 mm 0.030 mm 0 0 (3) (20) 0200 kPa -20220 kPa / 1 kPa OUT2 6 0.5F.S. 1 digit (25 ) 2F.S. 0 7 600 kPa 1.5 4 5 L/min 12 L/min 22 L/min DC24 V 10(p-p

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: R (Right Side), Switch Type: P (P & F PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A006 (Straight Machined ref NAAMS ACA208M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.7196 lb

Plug-in manifold for VQ1*0* valve, Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING .69819 lb

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.80044 lb

MTS

8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Rod cross section for 12, 16, 20, and 25 D-X 20Rod cross section for 32 and 40 Data With end lock 12 to 40 y !7 !6 q !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

ZSE1/ISE1

1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

Air Suction Filter

ZFA10 1/8 50 Large filter element surface P.276 30 Adaptable for a manifold application ZFA20 200 1/4 Cartridge type allows element replacement ZFB Unrestricted 360 piping tube mounting on the IN side 4 10 ZFB10 Universal joint type 6, 3/16" , 1/4" 20 Easy installation and removal with One-touch fittings 6, 1/4" 30 Light and compact molded resin parts ZFB20 P.279 30 8 50 Cartridge

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1209, 1210 P. 1204 to 1206 P. 1204 to 1206 P. 1207, 1208 P. 1211, 1212 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics Characteristics Base resistance Acid resistance Weatherability Ozone resistance Abrasion resistance Waterproof Solvent resistance (Benzene, toluene) Oil resistance benzol Oil resistance gasoline Operating temperature