Air Preparation Equipment

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Compact Vacuum Ejector Series ZQ

Vacuum pressure switch suction filter Voltage (Refer to Table 1.) 1 2 3 4 5 6 100 V AC 200 V AC 110 V AC 220 V AC 24 V DC 12 V DC Suction filter only 1 NPN output and analog output, suction filter 2 NPN outputs, suction filter 1 PNP output and analog output, suction filter 2 PNP outputs, suction filter F D31 D32 D51 Electrical entry D52 L plug connector, With 0.3 m lead wire With indicator

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

3

L/min L Note 2) With Under the New Measurement Law, units other Note 2) Analog 1 to 5 V (Analog 1 to 5 V) temperature than SI (symbol M) cannot be used in Japan.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V Grommet 24 V 2-wire 12 V Water resistant (2-color indication) Y7BA Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Solid state switches marked with are produced upon

Mini Free Mount Cylinder

Auto switch model Electrical entry Lead wire length (m) Load voltage Indicator light Pre-wired connector Special function Type Electrical entry Wiring (Output) 3 (L) 5 (Z) Applicable load 0.5 (Nil) 1 (M) AC DC Perpendicular In-line M9N M9P M9B M9NW M9PW M9BW F8N F8P F8B 3-wire (NPN) IC circuit 5 V, 12 V Solid state switch 3-wire (PNP) Relay, PLC 24 V Yes Grommet 2-wire 12 V 3-wire

Vacuum Ejector Series ZM

Standard supply pressure Nil A Side/Bottom entry Side entry Vacuum switch electrical entry M S 0.35 MPa 0.45 MPa 0.5 MPa H Body style Nil L C CL CN Nil L Grommet type, with 0.6 m lead wire (ZSE1) Grommet type, with 3 m lead wire (ZSE1) Connector type, with 0.6 m lead wire (ZSE1) Connector type, with 3 m lead wire (ZSE1) Connector type, without connector assembly Grommet type, with 0.5 m lead

10

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV2 M9NA2 v v V v v IC circuit 3-wire (PNP) M9PAV2 M9PA2 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV2 M9BA2 v v V v v 1 Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example

Guide Cylinder/Compact Type Series MGC

2-wire 24 V 200 V or less None C73C C80C Yes Connector None 24 V or less IC circuit Diagnostic indication (2-color indication) (B59W) B59W Grommet Yes Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

VS 8-2/VS 8-4

There is a danger of malfunction or damage to the reduced wiring system or input/output equipment. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

Fieldbus System

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

ITV

Use 0 V as the baseline for the power supplied to this product for output, control and input. +24 V +24 V Output power Output power 0 V 0 V Control/Input power Control/Input power 24 V +24 V 4. Each product needs to be powered by one power supply unit.

RSQ

12 V Connector 3-wire (NPN) Relay, PLC 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) D3-wire (PNP) Grommet -X Water resistant (2-color indication) 12 V 2-wire With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit 20Lead wire length symbols: 0.5 mNil (Example) A73C 3 m L (Example) A73CZ 5 m Z (Example) A73CL None Z (Example) A73CN Data Since

Thermo-chiller/Rack Mount Type

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 15 x 860 1120 [W] Thermo-chiller Q x t: Heat capacity [kJ] 20C Water bath Cooling capacity = Considering a safety factor

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

2-wire IC circuit Reed switch 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V IC circuit 5 V, 12 V Solid state switch Relay PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V For 25, 32, 40, 50, 63 Lead wire length (m) Load voltage Electrical entry Auto switch model Pre-wire connector Applicable load Perpendicular (1) In-line Special function Wiring

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length (m) Load voltage Indicator light Auto switch model Special function Wiring (Output) Electrical entry Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) Applicable load DC AC Perpendicular In-line A90V A90 100 V or less Relay, PLC 5 V, 12 V 24 V No 2-wire IC circuit 3-wire (NPN equiv.)

7

VXZ 2 x P Port size I F J a b 2 x 8.5 VXS e d L K VXB (D) VXE VXP VXR DIN terminal U V E Cable 6 to 12 G1/2 VXH C VXF (44) T 31.5 VX3 VXA B A IN OUT M 2 x P Port size I F J (D) K L (mm) Model Grommet DIN terminal Electrical entry Port size P A B C E F I J K L U T D M U 53 (59) T V 3/8, 1/2 96.5 (102.5) 25.5 30 28 61 (67) 4 B VXD2 70 20 11.5 14 50 33 37 27 64.5 52.5 Model Mounting bracket

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

ZQ

Vacuum pressure switch suction filter Voltage (Refer to Table (1).) 1 2 3 4 5 6 100 V AC 200 V AC 110 V AC 220 V AC 24 V DC 12 V DC Suction filter only 1 NPN output and analog output, suction filter 2 NPN outputs, suction filter 1 PNP output and analog output, suction filter 2 PNP outputs, suction filter F D31 D32 D51 Electrical entry D52 L plug connector, With 0.3 m lead wire With light/