VFR

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

AC Servo Motor Driver

Refer to section 12.5 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Servo motor Servo amplifier Driver Extension cable CNP3 AWG 19 (red) AWG 19 (white) AWG 19 (black) U V W U V W M AWG 19 (green/yellow) (Note) a) Relay connector for extension cable (Note)

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Double acting with spring Vm/min -X Transferred article W Transferred article W Transferred article W Transferred article W Bracket Cancel cap Auto switch capable 20Mounting is possible with no protrusion from the body surface.

48

L W Load center of gravity located at a position offset when L = 25 mm L = 25 mm 0.4 1000 mm stroke 800 mm stroke 0.3 Displacement [mm] L 0.2 W 500 mm stroke 0.1 300 mm stroke 0.0 0 2.2 4.5 6.7 9.0 11.2 Load W [lbf] 3 Electric Actuator/Guide Rod Slider Belt Drive RoHS Step Motor (Servo/24 VDC) LEL25 Series LEL LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions

Lightweight and Compact

HRS090-W-l (Water-cooled refrigeration) HRS090-A-l (Air-cooled refrigeration) * This circuit construction of the position of the parts may be different from actual product.

AC Servo Motor Driver (CC-Link Type ）

time 215 775 1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

Air Slide Table Series MXP

4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

ZX

(Individual exhaust for Pilot valve) L LN Connector (0.3 m) Connector (W/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (W/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) Rated voltage 1 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 1 W (With indicator light: 1.05 W) 24 VDC and 12 VDC are applicable to 0.45 W.

CG1

Note) ( ): Long stroke 1-7-8 Standard: Double Acting Single Rod Series CG1 With Mounting Bracket Axial foot (mm) ZZ Z Bore (mm) LX Y X B LC LD LH LS LZ M W LT Without rod boot With rod boot Without rod boot With rod boot 67+l 74+l 75+l 83.5+l 95.5+l 95.5+l 104+l 104+l 20 25 32 40 50 63 80 100 4 4 4 4 5 5 6 6 6 6 45 (53) 3 3 3 3 32 36 44 54 66 82 7 7 8 15 15 16 34 20 44 49 58 71 86 3 10 10

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A1 L3 A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.

90

Note 8) For y (connector type) of the single unit, select L, L, or W.

NCA1

6 MF5 w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

Air Cylinder NCA1 Series

w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol: A29 DA 30 MM DA 30 30 MM DA 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 191 Simple Specials C96 Series Symbol Change of Trunnion Bracket Mounting Position 2 -XC14 The position for mounting the trunnion pivot bracket on the cylinder can be moved from the standard mounting position to any required

HRX-OM-S004

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

LEC-OM02904

1 ( 2 ) 2 V V L 2 M W W L 3 CHARGE TR ( 3 ) B1 RA L 11 B DC24V L 21 B2 CN2 LEC-MR-J3BAT MR-J3BAT USB D/A CN4 I/F ( ) CN1A CN1 B CN5 CN 3 ( 2 ) I/O USB 1.LECSS-S5 2.

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

Vacuum

w!