(mm) <M5, M6> <M5, M6> A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection
5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch
2 x 2.8 Mounting hole Manual override (Non-locking) Manual override (Non-locking) 5 x M5 x 0.8 5 x M5 x 0.8 3 position closed center: VZA2321-M5 3 position exhaust center: VZA2421-M5 SYA SYJA VZA VFA Pilot port (A side) Mounting hole 2 x 2.8 VFRA Pilot port (B side) 2 x M5 x 0.8 VA 2 x 2.8 Mounting hole Manual override (Non-locking) 5 x M5 x 0.8 1755 Series VZA2000 Dimensions: Base Mounted
MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread
HRSH150-W-20-*T HRSH200-A-20HRSH200-W-20R8-5 M5 30 3 phase 40 4 cores x AWG8 200 to 230 (4 cores x 8 mm2) VAC *including (60Hz) HRSH250-A-20HRSH250-W-20HRSH300-A-20ground 50 HRSH100-A-40HRSH100-W-403-phase 20 R5.5-5 380 to 415 HRSH100-W*-40-*T HRSH150-A-40HRSH150-W-403 x 5.5 mm2 VAC For power (3 x AWG10) (50/60Hz), line M5 30 3-phase 30 HRSH200-A-40HRSH200-W-40R14-5 460 to 480 1 x 14 mm2
counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0
A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96
For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting
The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.
Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time
x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1
(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages
4 r t e !6 Component Parts MHZ Note Material Material No. Description No.
20 18 t A A 8x 23 8x 19 4x 20 75 Flange bolt hole Drawing of view A 1300 720 1290 150 160 t Other than Option K Option K Model JIS flange 80A 10K Compressed air inlet For Option K 16K 64 direction direction Ventilation 17 or less) (Electric wire diameter Ventilation Signal cable outlet Power supply cable fixture 18 to 23) (Electric wire diameter 40 Grommet with membrane 1332 1432 Terminal
268 217 9351 t A A 8x23 8x19 75 20 4x A 1300 720 1290 160 150 t K K K16K 64 (K16K) (17) 17) JIS 80A 10K JIS 80A 10K 1823) 40 (18~23) 1332 1432 1.3 1.3 () 1,3 (1) 1,3 (1) () 9902 20 475 1030 950 (3) (3) (2) (2) IDF100150F 6-3 6 4 IDX-OM-U021 6 6-4 IDF100/125F-30R () CM OLR MC1,2 THR THS1,2 TB1,2 FM1,2 V SWL SW L PRR PRS1 PRS2 PRS3 PLC HM GFCI EDV
(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K
Stop 1)CC-Link cable (LECSC, LECSC-T), SSCNETIII cable (LECSS, LECSS-T) 2)When using test operation mode (JOG operation), the LECSC, LECSS, LECSC-T, LECSS-T need the MR-Configurator2TM. 6 - 1.3 Gain tuning 1.3.1 Procedure Here are the steps for basic gain tuning. Refer to the Driver operation manual for details and for tuning methods other than shown below.
S Coupler KK Tubing T S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 98 C O N T E N T S HRS100/150 Series Standard Type HRS
x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread