End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

Air-hydro Unit

mounting screw Unit port U1, U2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18 S F 35 CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35

High Vacuum L Type Valve

pressure MPa(G) 0.4 to 0.7 for 0.5MPa 31 61 220 390 680 1420 Air consumption cm3 Note 3) Port size M5 Rc 1/8 Weight kg 0.29 0.49 1.2 1.9 3.3 5.7 Note 1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-A44 D-A44C Setting Position of Auto Switch (mm) Mounting Height of Auto Switch (mm) D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5, B6 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F D-A5,A6 D-A3,A3C D-B5,B6 D-G5W D-K59W D-G5BAL D-G59F Model D-F5W D-J59W D-F5BAL D-F59F D-A3C D-G39C D-K39C D-A44C D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A44,A44C D-A59W

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Port thread type (for 32) Nil TN TF Rc NPT G Action D Double acting M5 for 15 to 25.

Two Hand Control Valve

Two Hand Control Valve VR51 Series RoHS An output is available through synchronized, twohanded operation (within 0.5 s)!

10

D-X 893

Digital Pressure Switch

+ ZS-39-B -60No.PS-OMM0005-J Panel mount side piping + Front protective cover Z/ISE10(F)-M5-#-##D# Panel mount rear piping + Front protective cover Z/ISE10(F)-M5R-#-##D# -61No.PS-OMM0005-J Panel cut-out dimensions DIN rail mounted side piping Z/ISE10(F)-M5-#-##R# -62No.PS-OMM0005-J Revision history A: Revision B: Revision C: Modified errors in text.

Multistage Ejector Series ZL112.212

5 4.5 (40) Section A/ With Digital Pressure Switch for Vacuum ZL212-D 30 (5.8) 4 x M5 x 0.8 Thread depth 6 (Mounting hole) 73 87 1077 Series ZL Made to Order Specifications Please contact SMC for detailed specifications, dimensions and delivery.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

side End block assembly L SX3000-53-1A SX5000-53-1A For U side 5 Connector box VZ3000-106-1A For 24VDC only 6 Rail stopper TXE1-SMC Maybe by Kasuga Electric Works SY3000-43-1ASY000-43-2AType D, 2 to 8 stations Type u, 9 to 16 stations SY3000-43-2ASY3000-43-3AType D, 9 to 16 stations Type u, 2 to 8 stations 7 Connector assembly SY3000-43-1NASY3000-43-2NAType D, 2 to 8 stations Type u, 9 to

XL-OMY0002

S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-Y7WV D-Z7 D-Z8 D-Y69 D-Y7PV D-Y59 D-Y7P D-Y7W D-Y7BAL 5 10 15 20 10 5 10 15 20 1 pc. 10 10 20 25 15 10 10 15 20 2 pcs.

Lubrication Equipment

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10 Auto Feed Lube ALF400 to 900 Standard Specifications Auto Feed Lube Auto Feed Tank Model 1 2 ALT-9-IS1 2 ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 ALT-5 ALT-5

IDX-OM-W011

9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D

MRQ

, A80, D-A7lH, A80H D-A73C, A80C 54 12 Reed switch D-A79W D-J79, J79W 53 49 11 11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

CC

Wall mounting screw Unit port U1, U2 MI W S CEP1 CE1 CE2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18 S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 1/2 148.5 103.9 45 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 1/2 148.5 57 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9

CC

Wall mounting screw Unit port U1, U2 MI W S CEP1 CE1 CE2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18 S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143