5 Port Solenoid Valve (Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.
YB-03 YB-05 32, 40 50, 63 6.5 6.5 10 12 18 22 50 60 9 11 80 120 9 Series CVQ Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height 32, 40, 50, 63 D-M9 type/D-M9W type/D-A9 type D-M9V type/D-M9WV type/D-A9V type A W A B Approx.
B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.
Action D Double acting Mounting Cylinder stroke Through hole & Double end tapped (Standard) Foot type Rod side flange type Head side flange type Double clevis type B L F G D Note) Bore size (mm) Standard stroke (mm) 10 10, 20, 30, 40 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 Note) Available with the MQQL only. 25 10, 20, 30, 40, 50, 75, 100 Mounting brackets are included when shipped
Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.
model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24
Auto Switch Mounting Height (mm) D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BA D-F5NT Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-M9V D-M9WV D-M9AV D-A5 D-A6 D-A59W D-A9V D-P4DW D-A44 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Bore size 32 40 50 63 80 100 125 24.5 23 35 67 27.5 77 27.5 27.5 24.5 25.5 23 32.5 23
clip Pipe thread type *1 Only Option Z or Z1 can be selected.
(illodel) al D l H t wt wl 0E .tfit(B) 2.25 2.63 MlO x 1,0 .t2 N/A 0.34 1.95 .34 .40 /A l.t/A l{/A 0EII.r tm(B) 3.22 3.6r Ml2 x 1,0 t3 N/A 0.34 2.81 .43 .56 N/A .43 .38 (r.R)0rxr.25(Bl 3.22 3.59 y2.?
40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 33.5 34 34.5 8 5 to 50 11.5 5 to 50 H J L P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.
Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128
Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches
20 + 40 (n 2) 2 115 + 40 (n 4) 2 120 + 40 (n 4) 2 n (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 2, 4, 6, 8 ) 2 (Different surfaces, Same surface) 1 15 90 95 D-M9AVL 95 + 30 (n 4) 2 (n = 2, 4, 6, 8 ) 15 + 30 (n 2) 2 90 + 30 (n 4) 2 n (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) D-A5/A6 D-A59W D-F5/J5 D-F5W D-J59W D-F5BAL D-F59F 2 (Different surfaces, Same surface) 1 125 25 135 25 + 55 (
D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43 80 52.5 100 59 Minimum Stroke for Auto Switch Mounting Operating Range [mm] [mm] Number of auto switches D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW
0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes B D 16.5 14.5 Section AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) L K J V H S Z M MA W Model 36 40 93 82 58 20 102 40 30 65 MXP16-20B 42 50 119 108 70 30 128 56 46 75 MXP16-30B 14
Load voltage 24 VDC, 100 VAC 24 VDC, 100 VAC, 200 VAC 24 VDC (10 to 28 VDC) 24 VDC (10 to 28 VDC) 28 VDC or less 28 VDC or less Load current range Indicator light Type Auto switch model D-C73 D-B54 D-H7B D-K59 D-H7A1 D-G59 Application Relay, PLC Relay, PLC 24 VDC relay, PLC 5 to 40 mA, 5 to 20 mA Reed switch 5 to 50 mA, 5 to 25 mA, 5 to 12.5 mA 5 to 40 mA 5 to 40 mA 40 mA or less 40 mA or
Rc G Rc G C2SF-6-A C2SF-6C-A NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: CJ Semi-standard: J Piping port thread ty pe (9) Part No. Piping port thread ty pe (9) Part No. Rc C2SF-CJ-D G C2SFF-CJ-D NPT C2SFN-CJ(Z)-D Rc C2SF-J-D G C2SFF-J-D NPT C2SFN-J(Z)-D Appearance and part No.
Rc G Rc G C2SF-6-A C2SF-6C-A NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: CJ Semi-standard: J Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No. Rc C2SF-CJ-D G C2SFF-CJ-D NPT C2SFN-CJ(Z)-D Rc C2SF-J-D G C2SFF-J-D NPT C2SFN-J(Z)-D Appearance and part No.