0.4

0 Fitting assembly> Wiring 0 1 For single (2-wire) For double (3-wire) (For P, R port) VVQ1000 51A C8 C SSQ1000 4 A P 1 200 For station 2 to 24 kit Port size Wiring C6 C8 N7 N9 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 1/4" One-touch fitting for 5/16" 0 1 For single (2-wire) For double (3-wire) How to Increase Manifold Stations Manifold Options Lead wire length

Escapements Series MIW/MIS

+0.025 6 -0.1 0 7h9 -0.036 0 2.6 4 18 13 4 15 M3 x 0.5 7 6 (Effective depth 3) 8 -0.1 0 10h9 -0.036 0 2.5H9 0 +0.025 21 26 4.5 19 M3 x 0.5 9.5 23 3.3 5 18 10 (Effective depth 4) 13h9 -0.043 0 11 -0.1 0 4H9 0 +0.030 28.5 29.5 35 M5 x 0.8 25.5 5.1 7 12.5 6.5 25 15 (Effective depth 7) 17 (Effective depth 8.5) 17h9 -0.043 0 15 -0.1 0 41 41 40 5H9 0 +0.030 M6 x 1 37 6.8 10 17 10 28 21h9 -0.052

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

Hygienic Design Cylinder Series HY

0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.

Modular/F.R.L. Units Series AC

1500 0 200 400 600 800 00 25 50 75 100 125 150 0 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AC30 Rc3/8 AC40 Rc1/2 AC40-06 Rc3/4 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 500 1000 1500 0 1000 2000 3000 00 1000 2000 3000 4000 5000 0 0 Flow rate (l/min (ANR)) Flow

Direct Operated

to 0.5 0 to 0.5 1.5 3 1.5 3 3 1.5 3 1.5 1/8 (6A) Low vacuum 0 to 0.5 380 Low vacuum 0 to 0.5 Low vacuum 0 to 0.5 0 to 0.9 530 730 530 730 530 730 530 730 1/4 (8A) 0.64 0.17 0.40 0.38 0.20 1.6 Low vacuum 2.2 4 2.0 0 to 0.5 0 to 0.9 1.6 0.38 0.20 0.17 0.40 0.64 Low vacuum 4 2.2 0 to 0.5 0 to 0.9 0.64 0.17 0.40 0.38 0.20 1.6 Low vacuum 2.2 4 3/8 (10A) 0 to 0.5 0 to 0.9 1.6 0.38 0.20 0.17 0.40

Digital Flow Switch (Integrated display type)

to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min Accumulated Setting/display flow range 3 0 to 9 L flow Min. setting/display unit 1 L Accumulated flow volume per pulse 0.1 L/Pulse 0.1 L/Pulse 0.1 L/Pulse 1 L/Pulse Display unit Instantaneous

EX260-SPR-A_eng

Safety cannot be assured in the case of unexpected malfunction. 2 0 0 0 0 0 0 1 Valve manifold 3 0 0 0 0 0 1 1 ADDRESS 4 0 0 0 1 0 0 0 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

E-ITV-STD-RF-A

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV 0 2 I nput si gnal 010VD C

Modular F.R.L. Unit

0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC60 AC30 0.25 0.25 Set point Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.15 0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC40 0.25 Set point Outlet pressure MPa 0.2 0.15 0 0 0.2

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

Compact Manifold Regulator

0.00 0 20 40 60 80 100 0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200

C95Series

HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!

Cylinder

Load voltage 5V, 12V, 24V AC, DC I 24V DC 0' less M ax Io -ad ",a --"' -urr-e-n50mA -T--S 40mA -.-c" urrent -;:--nge O I-road c t + ---_ In _t _ e_ rn _a _l _v _ o _ lt _ a ,, 9 ,, e_d _'_ 0 cP _ _ + _ ~ 0 I 2AVOf~ __ -Leak current 0 Response time 1.2 ms COJPB6-1OD _ In _d _ ic c.a :.. t_ o_ , _ Ia _ m ..: p _ _ + __ .---!'

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

0 !1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

REC

across flats B1 I Relieving port Eh8 D MM AL CX -0.1 -0.2 K A U CZ N N F S+Stroke H L lNA Z+Stroke RR ZZ+Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17

LEC-OM005xx

Step data setting items in positioning operation (When connecting to LECP or LECA) Force (Pushing Force : In normal mode ) Set 0.

LECP6_C

ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - TB No.

MHL2

0.2MPa 40 40 0.2MPa 0.2MPa 0.2MPa 20 20 40 80 120 160 200 40 80 120 160 20 40 60 80 100 120 140 0 0 0 20 40 60 80 100 120 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa

Rotary Table/Vane Style Series MSU

MSUA3 MSUA3-S/SE 8 x M4 x 0.7 depth 7 C 58 36 44 B 27 30 4 x M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (Positioning pin hole) 22.5 29 2.5 3 3 x 3H9 depth 3 +0.025 0 2 x 4.5 through ( A , B , C ) 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2 x 4.5 through 6 2 x M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5