CATALOG

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Table of Contents

A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same as rod side flange style.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SX3000-75-1A SX5000-76-5A 10-SY3000 10-SY5000 M2: 0.16Nm M3: 0.8Nm M4: 1.4Nm 463 Base mounted 10-SY3000/5000 Type 45 Dimensions: Series 10-SY3000 Note) [ ]: AC 10-SS5Y3-45Stations DC4,N3 C6,N7 10-SS5Y3-45Stations UC4,N3 C6,N7 (Pitch) (Pitch) P = 10.5 DIN rail release button DIN rail release button 24.8 13.5 21.7 P=10.5 24.8 13.5 11.2 22.2 11.2 R R A A A A A A A A A A 10.2 25.2 22.2 10.2 25.2

Electric Actuators

m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 10 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PC Scale: 10% When two dimensions are shown, the top

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

10-SS5Y5-45Stations DC4, N3 C6, N7 C8, N9 10-SS5Y5-45Stations UC4, N3 C6, N7 C8, N9 Button for DIN rail release 26 25 P = 16 (Pitch) 17 26 17 P = 16 (Pitch) 14.5 32 Button for DIN rail release 14.5 32 15.5 31.5 15.5 31.5 R A A A A A R A A A A A B P B B B B B B B B B P Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting

A

N D A R D S T R O K E Stroke Bore Size 5, 10 12, 16, 20, 25, 32, 40 10, 20 50 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Table of Contents

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

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10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Table of Contents

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

Table of Contents

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

ZP

flat 10 Width across flat 10 A A 10 10 2 2 1.8 1.8 8.4 6 Dimensions (per stroke) Dimensions (per stroke) 10 13 Weight (g) Non-rotating (J) Rotating (K) Weight (g) Non-rotating (J) Rotating (K) 14 11 A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 13.5 P = 10.5 18.3 14.1 8.4 60.6 8.6 45.5 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 24.6 23 59.5 3 5 E 3/5 E 3/5 E 5 3 E 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 5/16" PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6,

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 10-SS5YJ3-S31 Type 10-SS5YJ3-32 Type 10-SS5YJ3-S32 Type 10-SS5YJ3-32P Applicable manifold base Type 10-SS5YJ3-20 Type 10-SS5YJ3-21P Manifold base Applicable manifold base Type 10-SS5YJ3-41 Type 10-SS5YJ3-S41 Type 10-SS5YJ3-46 Type 10-SS5YJ3-S46 Manifold base Manifold base Protrusion for positioning A mark A mark Manifold gasket Manifold gasket Manifold gasket A A SYJ3000-14-7 SYJ3000

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

4 port base mounted 10-SYJ3000 Common SUP/Common EXH Common SUP/ Individual EXH R P A P. 299 B Type 32 4 port base mounted 10-SYJ3000 P R A P. 299 B Type 40 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 P. 357 Type 41 10-SYJ3000 5 port base mounted P. 299 10-SYJ5000 P. 327 10-SYJ7000 P A P. 357 B Type 42 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 B B R P A P. 357 Type 43 5 port

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

ZP

flat 10 Width across flat 10 A A 10 10 2 2 1.8 1.8 8.4 6 Dimensions (per stroke) Dimensions (per stroke) 10 13 Weight (g) Non-rotating (J) Rotating (K) Weight (g) Non-rotating (J) Rotating (K) 14 11 A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5

Table of Contents

G Hexagon width across flats 7 Elliptic e c a d b Flat Elliptic Thin Flat/Thin Flat with Ribs C Y A B A a e Y b c d Model B C Y Model Model ZPR02U-0-A8 ZPR10UT ZPR2004U 10 11 1 2 2 2.6 1.2 1.2 0.3 4 2.6 4.6 ZPR04U-0-A8 ZPR13UT ZPR3507U 13 14 4 3.5 4.8 1.8 1.6 0.8 0.5 7 4.3 7.8 1.5 ZPR06U-0-A8 ZPR16UT ZPR4010U 16 17 6 4 7 2 0.8 10 5 11 2.5 2.5 ZPR10CT 10 11 0.8 ZPR08U-0-A8 8 9 1 ZPR13CT 13

Air Slide Table

[mm] Rubber Stopper Model A B C D E F MXQ6(A) 41.5 27 17 25 15 10 MXQ8(A, C) MXQ6B 41.5 27 16 25 14 10 MXQ12(A, C) MXQ8B 46.5 28 17 27 16 11 MXQ16(A) MXQ12B 51.5 30 16 28 15 13 MXQ20(A) MXQ16B 58.5 32 19 31 18 13 MXQ25(A) MXQ20B 65.5 34 15 33 15 18 Cap bracket Stroke A RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

auto switch A 62.2 72.2 75 85 88 98 Bore size (mm) Without auto switch With auto switch A 53 63 64.5 74.5 76 86 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Dimensions except A, L and L1 are the same as rod side flange style.