XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

REA_EN

Fn Fig. 6-1 Actuating force The relationship between Lo and Fn can be figured from Fig. 6-2. Fig. -2 Relationship between Lo and Fn Sizing In each graph, find the point where 8 of X axis crosses Ex) Sliding resistance of load100N with 100 of Y axis.

CYBx-OM0001H

Fn Fig. 5-1 Actuating force The relationship between Lo and Fn can be figured from Fig. 5-2. A Fig. 5-2 Relationship between Lo and Fn Sizing In each graph, find the point where 8 of X axis crosses Ex) Sliding resistance of load100N with 100 of Y axis.

REA/REB

Model determination 3 Series REA Model Selection 2 Design Parameters 1 Selection Method 25 40 32 500 500 300 400 300 300 Recommended driving force Fn (N) 200 Recommended driving force Fn (N) Recommended driving force Fn (N) 200 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable range Usable range Usable range

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Bore size Port thread type 12 16 20 25 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12 to 25 M thread Rc NPT G Nil Body Option Manufacturable Range FN MF M N F Bore size Nil TN TF 32 to 63 12, 16 20 to 63 Clamp stroke Arms are assembled at the time of shipment.

High Vacuum L Type Valve

C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG

High Vacuum L Type Valve

C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

CYRx-OM0001H

Recommended actuating force Fig. 7-1 Actuating force The relationship between Lo and Fn can be figured from Fig. 7-2. A Fig. 7-2 Relationship between Lo and Fn Sizing In each graph, find the point where 8 of X axis crosses Ex) Sliding resistance of load100N with 100 of Y axis.

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Basic type / Direct mount type Series CY3B/CY3R

Find the drive resisting force Fn (N) when moving the load horizontally. CY3B6 CY3B32 400 300 200 40 30 20 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 2.

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

Rotary Actuator NCRA1 Series Single Rack and Pinion

+l71lv }'FN Df'PV ffil* ,8F59 DIP !$e. ItrrSl T}FsPIT' ce{, 'srli9F D.ftt{R Ithilq &xie 2-wie $rirc 24rir 3-wirc 2-wie $wire tuhul NPN PNP NPN PNP NPN PNP NPN NPN Felay, lC. Sequence Felay, Se$nce cdlroller Belay, lc, Relay, Sequ*lcr Relay, tc Rolay, Sequence Fehv, lC, Sequence controtler colrlrollr Pder Elhge 5-24VDC 5 -12-24VDC 12-24WC ,12-24Vrc 5-12-24!