CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

D-F9NW(V) Auto Switch Weights DC (+) Brown [Red] (g) Model D-F9NW D-F9NWV D-F9PW D-F9PWV D-F9BW D-F9BWV Main switch circuit OUT Black [White] Lead wire length 0.5m 7 7 7 7 7 7 Lead wire length 3m 34 34 34 34 32 32 DC () Blue [Black] Auto Switch Dimensions D-F9NW, D-F9PW, D-F9BW D-F9PW(V) DC (+) Brown [Red] Main switch circuit Main switch circuit OUT Black [White] DC () Blue [Black] D-F9BW

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Flow Characteristics Series Flow characteristics C [(dm3/sbar)] b Cv 0.12 0.21 0.74 0.36 0.32 0.35 0.46 0.83 2.9 SYJ3000 SYJ5000 SYJ7000 Cover (stainless steel) Rubber seal 4/5 Port Solenoid Valve Series SYJ3000/5000/7000 Variations Option Manual override Sonic conductance: C [dm3/(s.bar)] Type of actuation Series Voltage Electrical entry With light/surge voltage suppressor SYJ3000 For DC

IDX-OM-W093

1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2

IDX-OM-W017

A 7 3 7 4 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3/h(ANR) 1) 8 23 29 32 39 72 m 10 1ANR65% 2 IDFA Series 7-1 7 1 IDX-OM-W017 8 C C 8-1 1) 2) 8-2 8-1 IDFA Series 8 1 IDX-OM-W017 9 K 9 K 4-2 9-1 1. 1 2 2. 3.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

VNB

G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306. V100 Fitting assembly Clip SY Clip SYJ VQZ200: Vertically clipped to the valve body VQZ100/300: Horizontally clipped to the valve body. VK VZ Note) For VQZ100, refer to page 4-14-13.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315 Switches Solid State Switches Applicable Actuators Series LXF, LXP, LXS D-F9 Series LJ1 (non-standard motor) D-Y7GL Cannot be mounted on Series LXF with ball screw specification.

IDX-OM-V020

Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT . 7-5 Chapter 8 Option A . 8-1 8.1 SAFETY INSTRUCTIONS FOR USE . 8-1 8.2 SPECIFICATIONS . 8-1 8.3 AIR PIPING . 8-1 8.4 AIR FLOW CAPACITY . 8-1 8.5 AIR/ REFRIGERANT CIRCUIT . 8-2 Chapter 9 Option C . 9-1 9.1 SPECIFICATIONS . 9-1 9.2 PRECAUTIONS

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Compact Cylinder with Air Cushion Series RQ

L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

x 4 x 1.5 MYMK-20-Stroke MYM25-15AA5903 GMY25 RCS-8 TMY-25 MYM32-15AA5904 GMY32 RCS-10 TMY-32 MYM40-15AA5905 GMY40 RCS-12 TMY-40 C-4 C-9 MYMK-40-Stroke MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYMK-16-Stroke 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 C-6 MYMK-25-Stroke C-7 MYMK-32-Stroke Polyurethane

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Air Cylinder CP Series Cylinder Positioner Assembly

z 1 . 7 a x.43 o 1 ) 2.24 (58) M26x1.51 5 7 a40) c 9 8 125\ 4.96 (126\ 1.42 140 l;$?'

Compact manifold regulator ARM5 Series

C P P K K 8 U 57 (at knob locked) DIN rail part no.

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling