Ionizer

With 2 pcs.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Max. 1 2 Min.

AS-FPQ/AS-FPG

Max. 1 2 Min.

AS-FPQ/AS-FPG

Max. 1 2 Min.

Applicable Auto Switch Model

Part No. of auto switch mounting bracket (including nut, screw and spacer) Bore size (mm) 12 BQ-1 Cylinder series 40 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 BQ-1 20 16 BQ-1 25 BQ-1 50 BQ-2 32 BQ-2 63 BQ-2 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BMU1-025 BMU1-025 BMU1-025 BMU1-025 BMU1-025 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 BQ-1 Mounting screw set (Stainless steel specification) Use the following

Digital Pressure Switch ( compatible)

Remarks Bracket A ZS-46-A1 Rear piping Self tapping screws: Nominal size 3 x 8L (2 pcs.) Bracket C ZS-46-E Bottom piping Self tapping screws: Nominal size 3 x 10L (2 pcs.)

Digital Flow Switches Series PF2A

B F Accumulated pulse output Brown 1 Load ON OFF OUT1 Main circuit Main circuit 4 Black Analog output White A 50 msec 2 + 24 VDC Load DOWN MODE SET U P 3 Blue C 2-G 60 Load is an analog input equipment such as a voltmeter, ammeter.

Digital Flow Switch Series PFA For Air Series PFW For Water

2-G 28 29 PFA7H-(-M) (41.5) 3 4 Brown Main circuit Black OUT1 24VDC Analog output 2 1 Load White Connector pin numbers Load Blue Pin description Pin no. 68 69 DC (+) 1 PFA7H-(-M) Analog output 2 DC () 3 Accumulated pulse output wiring examples OUT1 4 4-I thread depth J 40 Max. 30V 80mA or less OUT1 Black Load ON H OFF Blue 50msec PFA7H-(-M) 28 29 B C D E F G H I J A Model Brown PFA703H PFA706H

Compact Vacuum Unit Ejector/ Vacuum Pump System

Current consumption 15mA or less Accuracy +/-2%F.S.

Digital Flow Switch

[HYS] Hysteresis mode [2ot] Switch operation of OUT2 2 [2_P] Normal output [F 2] [oU2] page 39 [P_2] Set value of OUT2 2 [100] 100 L/min [H_2] Hysteresis of OUT2 2 [ 10] 10 L/min [F 3] [rES] [rES] Response time [1.00] 1 second page 44 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 45 [F13] [rEv] [rEv] Reversed display mode [oFF] Not reversed page 46 [F20] [inP]

PSxx-OMU0008CN

10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E

0.5

Ground the F.G. cable with a resistance of 100 or less +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V 0 V 0 V DC/DC Power supply 24 VDC Power supply 24 VDC Blue (2 pcs.) 0 V 0 V 0 V DC/DC 0 V Blue (2 pcs.) 0 V 0 V F . G. F . G.

Digital Pressure Switch

) Between wires and case Temperature characteristic 3% F.S. (25 C Ambient temperature range)) Oil resistant vinyl cabtyre cable 3 cores (N.P) 3.5, 2 m 4 cores (A.B) Sectional area of conductor: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Outside diameter of insulator: 0.95 mm Lead wire Standard CE marked (EMC directive/RoHS directive), UL/CSA Piping specifications Model No. 02 N02 F02 C01 A2 B2 Port

Moisture Control Tube

Correction Factor C1 for Supply Air Dew Point Kv: Volume ratio Vt : Piping volume (mm3) Vc: Actuator volume (mm3) Kv = q Vt Vc Correction factor C1 2 Supply air dew point (C) 10 Vt : Piping volume (mm3) [can be selected from piping volume chart in Fig. 2.] d : Tube I.D.

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

“

141 43 91.7 76.1 65.3 22 48.1 EXH OUT IN 2 x 1/4 to 1/2 Port size 2 x 1/2 Port size 66 With digital pressure switch: IR32l1 2-0llEl-A 76 48 72.5 53 16 M12 x 1 Mounting hole 2.3 M28 x 1.5 30 141 91.7 76.1 65.3 22 48.1 2 x 1/8 Pressure gauge port EXH OUT IN 66 2 x 1/2 Port size 2 x 1/4 to 1/2 Port size 786 IR1200-A/2200-A/3200-A Series Specific Product Precautions 1 Be sure to read this before

90

BLEED 2 x 1/8 Pressure gauge port 141 43 91.7 76.1 65.3 22 48.1 EXH OUT IN 2 x 1/4 to 1/2 Port size 2 x 1/2 Port size 66 With digital pressure switch: IR30l1 2-0llEl-A 76 48 72.5 53 16 M12 x 1 Mounting hole 2.3 M28 x 1.5 BLEED 30 141 91.7 76.1 65.3 22 48.1 2 x 1/8 Pressure gauge port EXH OUT IN 66 2 x 1/2 Port size 2 x 1/4 to 1/2 Port size 804 IR1000-A/2000-A/3000-A Series Specific Product

OML0002-C

Body Assembly B Manifold mounting parts IZN10 ES 2 10 A002 01 06 Number of manifold Mounting pitch ES 17mm 2 2 stations 3 3 stations 4 4 stations Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Large flow nozzle Type Energy saving charge elimination nozzle Electrode needle cleaning kit/IZS30-M2 Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch

ALF400 to 900, ALT-5/-9

Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

ALF400 to 900, ALT-5/-9

Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Note 1) Tank pressure is removed when line pressure is stopped.