Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4
[mm] Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2H04-M5G1 8 7.9 7.7 10 17.7 14.7 13.3 4 4 2.5 3.3 6 M5 x 0.8 KQ2H06-M5G1 10 9.9 9.7 12 17.7 14.7 13.3 4 4 2.5 4.1 *1 D Oval type M A L 4, 6 H *1: D is the body diameter.
R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 1 1 Without check valve 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.
exhaust center One-touch fitting for 4 C4 5 3 position pressure center One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 SI Unit Part No.
Set-up . 4-1 4.1 Set-up, Transport and Transfer. 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.2 Piping . 4-2 4.2.1 Preparation of Cooling Water . 4-3 4.2.2 Quality of Cooling Water . 4-5 TOC-1 A_HEC-OM-J004-4 Table of Contents 4.2.3 Preparation of Recirculating Fluid .4-6 4.2.4 Draining the Recirculating Fluid .4-7 4.3 Wiring. 4-9 4.3.1
exhaust center One-touch fitting for 4 C4 5 3 position pressure center One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 SI Unit Part No.
Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)
fluid . 4-2 4.3.2 Supply of circulating fluid . 4-3 4.4 Requirement for System Startup . 4-4 4.4.1 Turning ON power. 4-4 4.4.2 Circulating fluid temperature setting . 4-5 4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen
Input block type (Fill out for I/O unit only) Ports 2, 4 size (metric) Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) Ports 2, 4 Symbol C8 C10 C12 02 03 B CM 1 2 3 Ports 1, 3, 5 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting 1/4 3/8 Bottom ported Rc 1/4 Mixed Input block (Fill out for I/O unit only) 1: 1/2 3, 5: 3/4 Nil Without SI unit/input block
and Shutdown . 4-1 4.1 Pre-check . 4-1 4.1.1 Installation condition . 4-1 4.1.2 Cable connection . 4-1 4.1.3 Installation of circulating fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check emergency off [EMO] switch . 4-1 4.2 Opening of Facility water Valve . 4-1 4.3 Supply of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2
Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro
Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WPN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (8 points) (with broken line sensor) 1 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#
Shutdown . 4-1 4.1 Pre-check . 4-1 4.1.1 Installation condition . 4-1 4.1.2 Cable connection . 4-1 4.1.3 Installation of circulating fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check emergency off [EMO] switch . 4-1 4.2 Opening of Facility water Valve . 4-1 4.3 Supply of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2 4.3.2
Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WEN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (16 points) 2 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#B (8 points) 0 1 EX600-DY
(4) N\6A 4 0 34 01 = Mounted on Individual Subplate 3/8'NPTF Sid Ports (5) 02 = Mounted on Indivldual Subplate 1/2" NPTF Side Ports (5) 52 = Mountad on Individual Subplate ' 1/2' NPTF Side Ports (5); 10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate 3/8" NPTF Side Ports (5); Bottom Ports (5) 3t = Mourted on Stacking Manifold Block.3/8" NPTF Side Ports (4) a3 = Mounted on Stacking
(4) N\6A 4 0 34 01 = Mounted on Individual Subplate 3/8'NPTF Sid Ports (5) 02 = Mounted on Indivldual Subplate 1/2" NPTF Side Ports (5) 52 = Mountad on Individual Subplate ' 1/2' NPTF Side Ports (5); 10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate 3/8" NPTF Side Ports (5); Bottom Ports (5) 3t = Mourted on Stacking Manifold Block.3/8" NPTF Side Ports (4) a3 = Mounted on Stacking
size: 4 Inch size: 5/32" 3.5 38.5 A 16.5 1 Suction filter 15 Vacuum (V) port 78.8 A C V port type 06 08 07 09 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 1 Refer to page 22 for dimensions with a bracket mounted.
fitting for 4 C4 Port size 4(A), 2(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 VV5Z3-40 VV5Z3-41 VV5Z3-42-01 VV5Z3-42-C6 VV5Z3-43 0.16 0.17 0.21 0.20
Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)